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Micro-electrochemical valves and method

  • US 5,368,704 A
  • Filed: 08/06/1993
  • Issued: 11/29/1994
  • Est. Priority Date: 08/06/1993
  • Status: Expired due to Fees
First Claim
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1. A microelectrochemical valve structure comprising:

  • a monolithic substrate having a pair of opposed major surfaces;

    an array of passages through said substrate, each of said passages extending between and connecting said major surfaces, each of said passages further having a size defined by its minimum cross-sectional area;

    an electrochemically removable barrier associated with each of said passages in a position blocking fluid flow through said passage;

    an electrode associated with each of said passages, said electrode being in contact with said passage barrier, said electrode further being in electrical communication with an external lead; and

    at least one counter electrode associated with one of said substrate major surfaces, said counter electrode being in electrical communication with an external lead, said counter electrode further having the property of being in electrical communication with said passage electrodes when said associated substrate surface is in contact with an electrolyte,wherein a voltage difference applied between said counter electrode lead and one of said passage electrode leads removes the barrier associated with said passage thereby increasing flow communication between said substrate surfaces by an amount proportional to said passage'"'"'s size.

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