Electrode for use in a plasma assisted chemical etching process

• US 5,372,674 A
• Filed: 01/28/1994
• Issued: 12/13/1994
• Est. Priority Date: 05/14/1993
• Status: Expired due to Fees

• Current Assignee: Integrated Process Equipment Corp. (Speedfam Co., Ltd)
• Original Assignee: Hughes Aircraft Company (Rtx Corporation)
• Inventors: Steinberg, George
• Primary Examiner(s): POWELL, WILLIAM A
• Application Number:
  US08/189,262
• Time in Patent Office: 319 Days
• Field of Search: 156/643, 156/646, 156/657, 156/662, 156/345, 204/192.32, 204/192.37, 204/298.31, 204/298.33, 204/298.34, 219/121.4, 219/121.41, 118/723 E, 118/723 ER, 118/723 I
• US Class Current: 216/17
• CPC Class Codes: H01J 2237/3341 Reactive etching
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/3255 Material

Abstract

The electrode (11) of the present invention is used in a Plasma Assisted Chemical Etching process and comprises an inner member (47) surrounded by an outer member (45) defining a gap (77) therebetween such that a gas can flow therethrough. In the preferred embodiment, the inner member (47) and the concentric outer member (45) are both cylindrical in shape, therefore, the gap (77) has an annular configuration. A vertical ducting system is bored within the inner member (47) and directly or indirectly intersects the annular gap (77).

Claims

1. An electrode for use in a Plasma Assisted Chemical Etching process for etching a figurable substrate, said electrode comprising:

an outer member having an outside surface bordered by a top surface and a bottom surface, said outer member further having an inside surface thereof which defines a vertically oriented cavity therein, said cavity extending from said top surface to said bottom surface, said inside surface of said outer member having a lower portion thereof;

an inner member having an outside surface bordered by a top surface and a bottom surface, said outside surface of said inner member further having a lower portion thereof, said inner member having a ducting system bored therein which extends from said top surface thereof to said outside surface therethrough;

said inner member nesting within said cavity of said outer member such that said lower portion of said outer member'"'"'s inside surface and said lower portion of said inner member'"'"'s outside surface define a vertically oriented gap therebetween which extends downward to said bottom surfaces of said inner and outer members; and

gas source means for flowing a gas through said ducting system of said inner member and through said gap defined between said inner and outer members and onto said figurable substrate.

2. The electrode of claim 1 wherein said outside surface of said inner member is cylindrically-shaped and said inside surface of said outer member is cylindrically-shaped, with said gap defined therebetween being annular in shape.

3. The electrode of claim 2 further comprising:

a holding device having a cup-shaped portion; and

said outside surface of said outer member having a cylindrical cross sectional shape thereto with an upper inwardly stepped portion thereabove, said inwardly stepped portion being attached within said cup-shaped portion by an interference press fit.

4. The electrode of claim 2 wherein said outside surface of said inner member has an outwardly stepped portion located above said lower portion, said outwardly stepped portion is attached within a corresponding upper outwardly stepped portion of said inside surface of said outside member by an interference press fit, said outwardly stepped portion of said inner member is juxtapositioned above said annular gap and encloses the top thereof.

5. The electrode of claim 2 further comprising:

a chimney member having a horizontal portion with a circular edge thereof defining a circular aperture which extends centrally therethrough and being concentric with said annular gap, whereby said chimney element confines a plasma discharge created by said gas.

6. The electrode of claim 1 wherein said top and bottom surfaces of said outer member and said top and bottom surfaces of said inner member are substantially coplanar to one another.

7. The electrode of claim 1 wherein said ducting system further comprises:

said inner member having a duct vertically extending therein from said top surface to at least one passage located therethrough, said passage being positioned transversely between said top and bottom surfaces of said inner member and extending radially outward from said duct to said outside surface of said inner member.

8. The electrode of claim 1 wherein said ducting system further comprises:

a plurality of outwardly radiating grooves being located within said top surface of said inner member and said plurality of grooves intersecting each other centrally thereto; and

a conduit being positioned within each end of said plurality of grooves such that each conduit extends substantially downward to intersect said gap.

9. The electrode of claim 1 wherein said inner member and said outer member are magnesium.

10. The electrode of claim 1 further comprising:

a peripheral member having an outside surface bordered by a top surface and a bottom surface, said peripheral member further having an inside surface defining a vertically oriented cavity therewithin, said inside surface of said peripheral member also having a lower portion thereof,

said outside surface of said outer member having a lower portion thereof, said outer member having a ducting system therein;

said inside surface of said peripheral member being juxtapositioned around said outside surface of said outer member such that said lower portion of said peripheral member'"'"'s inner surface and said lower portion of said outer member'"'"'s outside surface define a vertically oriented second gap therebetween; and

said gas source means flowing said gas through said first gap and through said second gap onto said figurable substrate.

11. The electrode of claim 10 wherein said outside surface of said inner member is cylindrically-shaped, said inside surface of said outer member is cylindrically-shaped, said outside surface of said outer member is cylindrically-shaped and said inside surface of said peripheral member is cylindrically-shaped, said first and second gaps defined therebetween are annular in shape.

12. The electrode of claim 10 wherein said ducting system further comprises:

said outer member having at least one passage therethrough located transversely between said top surface and said bottom surface of said outer member; and

said passage of said outer member extending radially outward from said first gap to said second gap.

13. An electrode for use in a Plasma Assisted Chemical Etching process for etching a figurable substrate, said electrode comprising:

an outer member having an outside surface bordered by a substantially flat top surface and a substantially flat bottom surface, said outside surface of said outer member having a cylindrical cross sectional shape thereof with an upper inwardly stepped portion thereabove, said outer member further having a cylindrically-shaped inside surface which defines a vertically oriented cavity therein, said cavity extending from said top surface to said bottom surface, said inside surface of said outer member having a lower portion with an outwardly stepped portion located thereabove;

an inner member having a cylindrically-shaped outside surface bordered by a substantially flat top surface and a substantially flat bottom surface, said outside surface of said inner member having a lower portion with an outwardly stepped portion located thereabove, said outwardly stepped portion of said inner member'"'"'s outside surface being attached within said corresponding upper outwardly stepped portion of said outside member'"'"'s inside surface by an interference press fit, said outwardly stepped portion of said inner member being juxtapositioned above said annular gap and enclosing the top thereof, said inner member further having a duct vertically extending therein from said top surface to at least one passage located therethrough, said passage being positioned transversely between said top and bottom surfaces of said inner member and extending radially outward from said duct to said outside surface of said inner member;

said inner member fitting concentrically within said cavity of said outer member such that said lower portion of said outer member'"'"'s inside surface and said lower portion of said inner member'"'"'s outside surface define a vertically oriented annular gap therebetween which extends downward to said bottom surfaces of said inner and outer members, said top and bottom surfaces of said outer member and said top and bottom surfaces of said inner member being substantially coplanar to one another, said bottom surface of said outer member, said bottom surface of said inner member and said gap defined therebetween being directed toward a top surface of said figurable substrate; and

a gas source means for flowing a gas through said duct and said passage of said inner member and through said gap defined between said inner and outer members and onto said figurable substrate.

14. A method for using an electrode used in a Plasma Assisted Chemical Etching process to etch a figurable substrate, said method comprising:

(a) creating a ducting system within an inner member, said inner member having an outside surface with a lower portion thereof;

(b) creating a vertically oriented cavity centrally within an outer member, said cavity being defined by an inside surface of said outer member, said inside surface having a lower portion thereof;

(c) fitting said inner member within said cavity of said outer member such that said lower portion of said inner member'"'"'s outside surface and said lower portion of said outer member'"'"'s inside surface define a gap therebetween;

(d) mounting a figurable substrate below said bottom surfaces of said inner and outer members; and

(e) flowing a gas through said ducting system of said inner member and through said gap defined between said inner and outer members and onto said figurable substrate.

15. The method of claim 14 wherein said outside surface of said inner member is cylindrically-shaped and said inside surface of said outer member is cylindrically-shaped, said gap defined therebetween is annular in shape.

16. The method of claim 15 wherein said outside surface of said inner member has an outwardly stepped portion located above said lower portion, said outwardly stepped portion is attached within a corresponding upper outwardly stepped portion of said inside surface of said outside member by an interference press fit, said outwardly stepped portion of said inner member is juxtapositioned above said annular gap and encloses the top thereof.

17. The method of claim 14 wherein the method for producing said ducting system further comprises:

(a) creating a vertically oriented duct centrally within said inner member; and

(b) creating at least one passage within said inner member, said passage extending transversely therethrough and intersecting said duct centrally thereto.

18. The method of claim 14 wherein the method for producing said ducting system further comprises:

(a) creating a plurality of outwardly radiating grooves within said top surface of said inner member, said grooves intersecting each other centrally thereto; and

(b) creating a conduit within each end of said plurality of grooves, said conduits extending substantially downward from each of said plurality of grooves to said gap.

19. The method of claim 14 wherein said figurable substrate is a silicon electronic wafer.

20. The method of claim 14 wherein said figurable substrate is an optical device.

21. An improved electrode for use in a plasma assisted chemical etching process for etching a figurable substrate, the improvement comprising:

a magnesium electrode member.

25. The invention of any of claims 21, 22 and 24 wherein the electrode member is almost pure magnesium.

22. A method of etching a figurable substrate, the method including the steps of:

providing a gas plasma;

providing a magnesium electrode member; and

flowing said gas plasma through said electrode member onto said substrate to etch said figurable substrate.

23. An improved system of the type using an electrode and a plasma gas for etching a figurable substrate, the improvement comprising:

an electrode member made of a material selected to interact with said plasma gas to enhance the useful life of the electrode.

24. The invention of claim 23 wherein the electrode member is an almost pure element.

26. A method of etching a figurable substrate, said method including the steps of:

providing a gas plasma;

providing an electrode member made of a material which becomes passivated by said gas plasma to increase the durability of said electrode; and

flowing said gas through said electrode to etch said figurable substrate.