Integrated circuit probing apparatus including a capacitor bypass structure
First Claim
1. An electronic probe testing apparatus for use in testing a circuit and providing electrical signals between the circuit to be tested and a testing apparatus during a testing of the circuit comprising:
- a first probe which is useful for making an electrical connection to at least one first point of the circuit to be tested;
a second probe which is useful for making contact and supplying power to a second point of the circuit to be tested, the second probe being in a predetermined spaced-apart relationship to the first probe; and
capacitor means having a predetermined capacitance for capacitively coupling the first and second probes, comprising a first terminal which is electrically connected to the first probe and a second terminal which is electrically connected to the second probe, the capacitor means being flexible so as to facilitate independent movement of the first and second probes so as to facilitate contacting of the first and second points, respectively, of the circuit during testing thereof without substantially changing the predetermined capacitance thereof.
1 Assignment
0 Petitions
Accused Products
Abstract
A device for testing the performance of high speed integrated circuits (ICs) while in wafer form or separated from the wafer which includes first and second spaced-apart probes fixedly mounted on a support member for accurately positioning the first and second probes in three dimensions for contacting at least one first point and a second point, respectively, on an IC under test. The first and second probes are interconnected at a predetermined portion of their length by a capacitor means which provides sufficient flexibility so as to facilitate independent movement of the first and second probes and avoid introducing parameters (e.g., inductance) which interfere with high speed testing of the IC. In one embodiment, the first probe is a transmission line probe (e.g., a coaxial line) and the second probe is a wire probe for supplying power to the second point on the IC. In a another embodiment, the first and second probes are wire probes for providing a reference potential and power, respectively, to respective first and second points on the IC. The capacitor means can consist of just a foil type capacitor, or a capacitor in series with a flexible metal strip having dimensions to minimize inductance for electrically interconnecting the first and second probes. The capacitor functions to block direct current and pass A.C. signals when required.
159 Citations
32 Claims
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1. An electronic probe testing apparatus for use in testing a circuit and providing electrical signals between the circuit to be tested and a testing apparatus during a testing of the circuit comprising:
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a first probe which is useful for making an electrical connection to at least one first point of the circuit to be tested; a second probe which is useful for making contact and supplying power to a second point of the circuit to be tested, the second probe being in a predetermined spaced-apart relationship to the first probe; and capacitor means having a predetermined capacitance for capacitively coupling the first and second probes, comprising a first terminal which is electrically connected to the first probe and a second terminal which is electrically connected to the second probe, the capacitor means being flexible so as to facilitate independent movement of the first and second probes so as to facilitate contacting of the first and second points, respectively, of the circuit during testing thereof without substantially changing the predetermined capacitance thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 31)
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12. An electronic probe testing apparatus for use in testing a circuit and providing electrical signals between the circuit to be tested and a testing apparatus during a testing of the circuit comprising:
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a first probe comprising a transmission line having a first conductor and a second conductor separated by an insulating medium that provides an essentially resistive impedance, a first end of the first probe being adapted to contact the at least one first point of the circuit to be tested; a second probe which is useful for making contact and supplying power to a second point of the circuit to be tested, the second probe being in a predetermined spaced-apart relationship to the first probe; and a capacitor having a predetermined capacitance and comprising a first metallic conductor which is electrically connected to one of the first probe and the second probe, a second metallic conductor connected to the other one of the first probe and the second probe, and an insulating medium separating the first and second metallic conductors, the capacitor having dimensions which limits inductance thereof and sufficient flexibility to facilitate independent movement of the first probe and the second probe without substantially changing the predetermined capacitance thereof. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. An electronic probe testing apparatus for use in testing a circuit and providing electrical signals between the circuit to be tested and a testing apparatus during a testing of the circuit comprising:
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a transmission line probe that provides an essentially resistive impedance and comprises a first conductor and a second conductor separated by an insulating medium, a first end of the transmission line probe being adapted to contact at least one first point of the circuit to be tested; a wire probe which is useful for making contact and supplying power to a second point of the circuit to be tested, the wire probe being in a predetermined spaced-apart relationship to the transmission line probe; a capacitor having a predetermined capacitance and comprising a first metallic conductor which is electrically connected to one of the transmission line probe and the wire probe, a second metallic conductor, and an insulating medium separating the first and second metallic conductors; an electrically conducting metallic strip having a first end which is electrically connected to the other one of the transmission line probe and the wire probe, and an opposing second end which is electrically and mechanically connected to the second metallic conductor of the capacitor, the metallic strip having dimensions which limits inductance thereof and provides for sufficient flexibility so as to facilitate independent movement of the transmission line probe and the wire probe without substantially changing the predetermined capacitance of the capacitor. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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27. An electronic probe testing apparatus for use in testing a circuit and providing electrical signals between the circuit to be tested and a testing apparatus during a testing of the circuit comprising:
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a first wire probe which is useful for supplying a reference potential to a first point of the circuit to be tested; a second wire probe which is useful for supplying power to a second point of the circuit to be tested, the second probe being in a predetermined spaced-apart relationship to the first probe; and capacitor means having a predetermined comprising a first terminal which is electrically connected to the first wire probe and a second terminal which is electrically connected to the second wire probe, the capacitor means having a flexibility so as to facilitate independent movement of the first and second wire probes for contacting the first and second points, respectively, of the circuit to be tested without substantially changing the predetermined capacitance thereof. - View Dependent Claims (28, 29, 30)
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32. Electronic probe testing apparatus comprising:
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a first probe which is useful for making an electrical connection to at least one first point of an electrical device to be tested; a second probe which is useful for making an electrical connection to a second point of the electrical device, the second probe being in a predetermined spaced-apart relationship to the first probe; and capacitor means, which has a predetermined capacitance, for capacitively coupling the first and second probes, the capacitor means comprising a first terminal which is electrically connected to the first probe and a second terminal which is electrically connected to the second probe and being sufficiently flexible to facilitate independent movement of the first and second probes so as to facilitate contacting of the first and second points, respectively, of the electrical device during testing thereof without substantially changing the predetermined capacitance thereof.
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Specification