Surface emitting laser and method of manufacturing the same
First Claim
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1. A surface emitting laser comprising:
- a first DBR mirror composed of a semiconductor multilayer film formed on a semiconductor substrate;
a first cladding layer formed on said first DBR mirror;
an active region layer formed on said first cladding layer;
a second cladding layer formed above said active region layer;
a current constriction layer formed on said second cladding layer and composed of a semiconductor material having a wider forbidden band than those of said active region layer and said second cladding layer;
an opening formed in said current constriction layer;
a third cladding layer formed in said opening and on said current constriction layer and composed of a semiconductor material having a narrower forbidden band than said current constriction layer;
a second DBR mirror composed of a multilayer film formed on said third cladding layer; and
a first electrode and a second electrode to pass current between said first and third cladding layers.
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Abstract
A current constriction layer surrounding a vertical-cavity region is formed in a cladding layer of a surface emitting laser. The forbidden band width of the material forming this current constriction layer is wider than the forbidden band width of a material forming the cladding layer. Further, the current constriction layer and the cladding layer are formed of semiconductors, and conduction types thereof are different from each other. Further, the upper surface of the cladding layer covering the current constriction layer has a step in the periphery of vertical-cavity region.
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Citations
18 Claims
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1. A surface emitting laser comprising:
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a first DBR mirror composed of a semiconductor multilayer film formed on a semiconductor substrate; a first cladding layer formed on said first DBR mirror; an active region layer formed on said first cladding layer; a second cladding layer formed above said active region layer; a current constriction layer formed on said second cladding layer and composed of a semiconductor material having a wider forbidden band than those of said active region layer and said second cladding layer; an opening formed in said current constriction layer; a third cladding layer formed in said opening and on said current constriction layer and composed of a semiconductor material having a narrower forbidden band than said current constriction layer; a second DBR mirror composed of a multilayer film formed on said third cladding layer; and a first electrode and a second electrode to pass current between said first and third cladding layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 16, 17)
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11. A method of manufacturing a surface emitting laser comprising the steps of:
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forming a first DBR mirror by laminating a semiconductor multilayer film on a semiconductor substrate; laminating a first cladding layer on said first DBR mirror; forming an active region layer on said first cladding layer; laminating a second cladding layer above said active region layer; forming a current constriction layer having a wider forbidden band than those of said active region layer and said second cladding layer and composed of a material which is etched selectively for said second cladding layer; forming an opening which becomes a current path by applying patterning to said current constriction layer; forming a third cladding layer on said current constriction layer and said second cladding layer exposed in said opening; forming a multilayer film constituting said second DBR mirror on said third cladding layer; and forming a first electrode and a second electrode to pass current between said first and third cladding layers. - View Dependent Claims (12, 13, 14, 15, 18)
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Specification