Surface potential control in plasma processing of materials

• US 5,374,456 A
• Filed: 12/23/1992
• Issued: 12/20/1994
• Est. Priority Date: 12/23/1992
• Status: Expired due to Term

• Current Assignee: Hughes Electronics Corporation (Rtx Corporation)
• Original Assignee: Hughes Aircraft Company (Rtx Corporation)
• Inventors: Pepper, David M., Schumacher, Robert W., Matossian, Jesse N.
• Primary Examiner(s): PIANALTO, BERNARD D
• Application Number:
  US07/995,864
• Time in Patent Office: 727 Days
• Field of Search: 427/458, 427/523, 427/561, 427/570, 427/444
• US Class Current: 427/570
• CPC Class Codes: B29C 2035/0872 using ion-radiation, e.g. alpha-rays
• CPC Class Codes: B29C 2035/0877 using electron radiation, e.g. beta-rays
• CPC Class Codes: B29C 59/14 by plasma treatment plasma tubes per se H01J
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: C23C 14/48 Ion implantation
• CPC Class Codes: C23C 8/36 using ionised gases, e.g. ionitriding

Abstract

An object (30) is plasma processed by placing an electrically conducting grid (34) over all or a portion of the surface (32) of the object (30) so that the grid (34) generally follows the contours of the surface (32) but is displaced outwardly from the surface (32). Ions or electrons from a plasma surrounding the object (30) are accelerated into the surface (32) of the object (30) using as a processing driving force an electrical potential applied to the electrically conducting grid (34). The use of a contoured conducting grid (34) allows plasma processing of large, electrically nonconducting objects and objects having sharp surface features or recesses.

Claims

1. A method or plasma processing an object, comprising the steps of:

providing a three-dimensional, irregularly shaped object having a contoured surface;

placing an electrically conducting grid over the contoured surface of the object, the grid generally following the three-dimensional contours of the surface but being displaced outwardly from the surface; and

plasma processing the surface of the object with charge carriers produced in a plasma, the step of plasma processing including the steps of

generating a plasma of charge carriers around and adjacent to the contoured surface of the object, and

independently of generating the plasma, applying a plurality of pulses of an electrical accelerating voltage to the grid, the voltage being opposite in polarity to the charge carriers of the plasma.

2. The method of claim 1, wherein the charge carriers are ions.

3. The method of claim 1, wherein the charge carriers are electrons.

4. The method of claim 1, wherein the grid covers the entire surface of the object.

5. The method of claim 4, wherein the grid provides a constant potential volume that encloses the object.

6. The method of claim 1, wherein the grid covers a portion of the surface of the object, a conducting foil covers the remainder of the surface of the object, and the grid and conducting foil are electrically conducting.

7. The method of claim 6, wherein the grid and conducting foil together provide a constant potential volume that encloses the object.

8. The method of claim 1, wherein the method of plasma processing achieves ion deposition on surface of the object, and the step of plasma processing includes the step of

plasma ion depositing ions onto the surface of the object, using as a depositing driving force an electrical potential applied to the electrically conducting grid sufficient to deposit ions onto the surface but not implant ions into the surface.

9. The method of claim 1, wherein the method of plasma processing achieves ion implantation into the surface of the object, and the step of plasma processing includes the step of

plasma ion implanting ions into the surface of the object, using as an implanting driving force an electrical potential applied to the electrically conducting grid sufficient to implant ions into the surface.

10. The method of claim 1, wherein the step of plasma processing achieves ion mixing into the surface of the object.

11. The method of claim 1, wherein the step of plasma processing achieves electron bombardment into the surface of the object.

12. The method of claim 1, wherein the object is electrically conducting.

13. The method of claim 1, wherein the object is electrically nonconducting.

14. The method of claim 1, wherein the object is made of a polymeric material.

15. The method of claim 1, wherein the electrically conducting grid has an open area fraction of at least about 70 percent.

16. The method of claim 1, wherein the electrically conducting grid is made of a material that has substantially no sputter deposition onto the surface of the object.

17. The method of claim 1, wherein the electrically conducting grid is made of a material that sputter deposits onto the surface of the object.

18. The method of claim 1, wherein the electrically conducting grid is displaced outwardly from the surface of the electrically nonconducting object by at least about 1/2 inch.

19. The method of claim 1, wherein the surface of the object has a sharply shaped feature thereon, and the grid is shaped to generally conform to the feature.

20. The method of claim 1, wherein the surface of the object has a recess thereon, and the grid is shaped to generally conform to the recess.

21. A method for plasma processing an object, comprising the steps of:

providing an electrically nonconducting, three-dimensional object having a contoured exposed surface;

placing an electrically conducting grid over the contoured exposed surface of the object, the grid generally following the three-dimensional contours of the exposed surface but being displaced outwardly from the exposed surface to form a constant-potential volume adjacent to the entire exposed surface; and

plasma processing the exposed surface of the object with charge carriers produced in a plasma, the step of plasma processing including the steps of

generating a plasma around and adjacent to the exposed surface of the object, and

independently of generating the plasma, applying a plurality of pulses of an electrical accelerating voltage to the grid.

22. A method for plasma processing an object, comprising the steps of:

providing an object having an exposed surface;

creating an equipotential surface adjacent to the exposed surface of the object but displaced outwardly from the exposed surface; and

plasma processing the exposed surface of the object with charge carriers produced in a plasma, the step of plasma processing including the steps of

generating a plasma of charge carriers around the exposed surface of the object, and

independently of generating the plasma, applying a plurality of pulses of an electrical accelerating voltage between the equipotential surface and the plasma.

23. The method of claim 22, wherein the plasma is created outside of the equipotential surface.