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Flexure structure for stage positioning

  • US 5,374,556 A
  • Filed: 07/23/1992
  • Issued: 12/20/1994
  • Est. Priority Date: 07/23/1992
  • Status: Expired due to Fees
First Claim
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1. A flexure member, comprising:

  • a pair of parallel members, said pair of parallel members being substantially parallel and inflexible; and

    four sets of flexible spring members, said four sets of flexible spring members maintaining said pair of parallel members in a spaced parallel relationship, each of said four sets of flexible spring members comprising;

    at least two parallel flexible elements, each of said at least two parallel flexible elements having a first end and a second end,said first end of each of said at least two parallel flexible elements being disposed proximate one of said pair of parallel members,said second end of each of said at least two parallel flexible members extending diagonally from said one of said pair of parallel members in a direction toward the other of said pair of parallel members,wherein said second end of each of said at least two parallel flexible elements of a first set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a second set of said four sets of flexible spring members, thereby forming a first vertex and defining an included angle, and,wherein said second end of each of said at least two parallel flexible elements of a third set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a fourth set of said four sets of flexible spring members, thereby forming a second vertex and defining an included angle;

    wherein said included angle formed at said first vertex and said second vertex is less than 180°

    .

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