Multi-dimensional precision micro-actuator
First Claim
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1. A precision microactuator for movable microstructures, comprising:
- an integrated circuit wafer having a cavity;
a cantilevered beam having a longitudinal axis and having a first end fixed to said wafer and a second remote end extending into said cavity;
actuator means within said cavity between said first and second ends of said beam and dividing said beam into relatively movable, axially aligned, longitudinal segments;
means for applying a potential across said actuator means to cause said relatively movable beam segments to move with respect to each other to cause said remote end of said beam to move along said longitudinal axis with respect to said fixed end to vary the length of the beam; and
variable impedance means within said cavity and connected to said remote end of said beam for adjustment in response to application of said potential to said actuator means.
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Abstract
Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale variable impedances.
89 Citations
22 Claims
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1. A precision microactuator for movable microstructures, comprising:
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an integrated circuit wafer having a cavity; a cantilevered beam having a longitudinal axis and having a first end fixed to said wafer and a second remote end extending into said cavity; actuator means within said cavity between said first and second ends of said beam and dividing said beam into relatively movable, axially aligned, longitudinal segments; means for applying a potential across said actuator means to cause said relatively movable beam segments to move with respect to each other to cause said remote end of said beam to move along said longitudinal axis with respect to said fixed end to vary the length of the beam; and variable impedance means within said cavity and connected to said remote end of said beam for adjustment in response to application of said potential to said actuator means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A precision microactuator for movable microstructures, comprising:
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an integrated circuit wafer having a cavity; first and second axially aligned cantilevered beams, each beam having an axis, a first end affixed to said wafer and a second, remote, axially aligned end extending into said cavity, the remote ends of said beams being spaced apart; first and second actuators within said cavity and interposed between the first and second ends of said first and second beams, respectively, to divide each beam into relatively movable, axially aligned longitudinal segments; means for applying selected potentials across each said actuators to selectively produce relative axial motion of said longitudinal segments for each of said beams to selectively vary the length of each beam; and a variable impedance connected between the remote ends of said beams, whereby variation of the length of either of said beams will vary said impedance. - View Dependent Claims (22)
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Specification