Method and apparatus for moving a material removal tool with low tool accelerations

• US 5,375,064 A
• Filed: 12/02/1993
• Issued: 12/20/1994
• Est. Priority Date: 12/02/1993
• Status: Expired due to Fees

• Current Assignee: Integrated Process Equipment Corp. (Speedfam Co., Ltd)
• Original Assignee: Hughes Aircraft Company (Rtx Corporation)
• Inventors: Bollinger, Lynn D.
• Primary Examiner(s): RUGGIERO, JOSEPH F
• Application Number:
  US08/162,510
• Time in Patent Office: 383 Days
• Field of Search: 364/474.3, 364/563, 364/474.02, 364/500, 364/174, 156/625, 156/626, 156/643, 156/646, 156/345, 204/192.1, 204/192.13, 204/192.32, 204/192.37, 204/192.33, 204/298.32, 219/121.36, 219/121.4, 219/121.41, 219/121.54, 219/121.42, 318/571
• US Class Current: 700/188
• CPC Class Codes: G05B 19/416 characterised by control of velocity, acceleration or deceleration G05B19/19 takes precedence
• CPC Class Codes: G05B 2219/43009 Acceleration deceleration for each block of data, segment
• CPC Class Codes: G05B 2219/50071 Store actual surface in memory before machining, compare with reference surface

Abstract

A stage 14 supporting a material removal tool 12 is instructed by a controller 16 through interface 18 to accelerate and decelerate the material removal tool 12 within at least one predetermined spatial interval while satisfying the dwell-time required to remove a predetermined amount of material to achieve a desired thickness of the spatial interval.

Claims

1. A method for moving a material removal tool over the surface of a substrate to remove material from the substrate, said method comprising the steps of:

measuring the initial thickness profile of at least a portion of the surface of the substrate to develop a thickness profile map for at least a portion of the substrate;

determining a material removal tool dwell-time versus material removal tool position map based on the initial thickness profile map for the surface of the substrate that will result in a final predetermined thickness profile for the surface of the substrate;

calculating a removal tool acceleration map for the surface of the substrate based upon the removal tool dwell-time versus material removal tool position map; and

moving the material removal tool according to the material removal tool acceleration map so as to remove a predetermined amount of material from the surface of the substrate to achieve the desired substrate surface profile according to the final predetermined thickness profile.

2. A method for moving a material removal tool over the surface of a substrate to remove material from the substrate, said method comprising the steps of:

dividing the surface of the substrate into at least one spatial interval;

measuring the thickness of said at least one spatial interval;

comparing the measured thickness of said at least one spatial interval with a desired thickness for said at least one spatial interval;

determining an amount of material to be removed from said at least one spatial interval that will result in a desired thickness for said spatial interval;

calculating a material removal tool dwell-time for said at least one spatial interval that will remove material from said at least one spatial interval to achieve the desired thickness for each spatial interval;

calculating a series of removal tool accelerations for said at least one spatial interval that will allow the material removal tool to remain in each of the plurality of spatial intervals for a period of time corresponding to the calculated dwell-time for said at least one spatial interval; and

moving the material removal tool relative to the surface of the substrate with acceleration and deceleration within said at least one spatial interval according to the series of removal tool accelerations calculated for said at least one spatial interval.

3. The method of claim 2, wherein the series of removal tool accelerations is calculated so as to make the acceleration of the removal tool time dependent.

4. The method of claim 2, wherein the series of removal tool accelerations is calculated so as to make the acceleration of the removal tool position dependent.

5. A method for moving a material removal tool over the surface of a substrate to remove material from the substrate, said method comprising the steps of:

dividing the surface of the substrate into a plurality of spatial intervals;

measuring the thickness of each of the plurality of spatial intervals;

comparing the measured thickness of each of the plurality of spatial intervals with a desired thickness for each of the plurality of spatial intervals;

determining an amount of material to be removed from each of the plurality of spatial intervals that will result in a desired thickness for each of the plurality of spatial intervals;

calculating a material removal tool dwell-time for each of the plurality of spatial intervals that will remove material from each of the plurality of spatial intervals to achieve the desired thickness for each of the plurality of spatial intervals;

calculating a series of removal tool accelerations for each of the plurality of spatial intervals that will allow the material removal tool to remain in each of the plurality of spatial intervals for a period of time corresponding to the calculated dwell-time for each of the plurality of the spatial intervals; and

moving the material removal tool relative to the surface of the substrate with acceleration and deceleration within each of the plurality of spatial intervals according to the series of removal tool accelerations calculated for each of the plurality of spatial intervals.

6. The method of claim 5, wherein the series of removal tool accelerations for each of the plurality of spatial intervals is calculated so as to make the acceleration of the removal tool within each of the plurality of spatial intervals time dependent.

7. The method of claim 5, wherein the series of removal tool accelerations for each of the plurality of spatial intervals is calculated so as to make the acceleration of the removal tool within each of the plurality of spatial intervals position dependent.

8. An apparatus for moving a material removal tool over the surface of a substrate to remove material from the substrate, said apparatus comprising:

means for dividing the surface of the substrate into at least one spatial interval;

means for measuring the thickness of said at least one spatial interval;

means for comparing the measured thickness of said at least one spatial interval with a desired thickness for said at least one spatial interval;

means for determining an amount of material to be removed from said at least one spatial interval that will result in a desired thickness for said spatial interval;

means for calculating a material removal tool dwell-time for said at least one spatial interval that will remove material from said at least one spatial interval to achieve the desired thickness for each spatial interval;

means for calculating a series of removal tool accelerations for said at least one spatial interval that will allow the material removal tool to remain in each of the plurality of spatial for a period of time corresponding to the calculated dwell-time for said at least one spatial interval; and

means for moving the material removal tool relative to the surface of the substrate with acceleration and deceleration within said at least one spatial interval according to the series of removal tool accelerations calculated for said at least one spatial interval.

9. The apparatus of claim 8, wherein the means for moving the material removal tool is a 5-axis stage.

10. The apparatus of claim 8, wherein the means for calculating a series of removal tool accelerations further comprises a means for making the series of removal tool accelerations time dependent.

11. The apparatus of claim 8, wherein the means for calculating a series of removal tool accelerations further comprises a means for making the series of removal tool accelerations position dependent.