Thermal micropump with values formed from silicon plates
First Claim
Patent Images
1. A micropump comprising:
- a first plate constructed of silicon forming a first part of a chamber;
a second plate constructed of silicon forming a second part of the chamber and coupled to the first plate;
the chamber including an intake valve at a first location of the chamber for movement between a first position for allowing fluid to flow into the chamber and a second position for preventing fluid from flowing into the chamber;
the chamber further including a discharge valve at a second location of the chamber for movement between a third position for allowing fluid to flow out of the chamber and a fourth position for preventing fluid from flowing out of the chamber; and
a heating element member forming a third part of the chamber for controlling a temperature of fluid in the chamber, the heating element member including a carrier and a heating element;
wherein the intake and discharge valves are formed out of the first and second plates, and wherein the carrier is coupled to the first plate, with the carrier supporting the heating element at a first surface of the carrier and having a lower thermal capacity and a lower thermal conductivity at the first surface of the carrier than at a remainder of the carrier.
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Abstract
In a micropump having a working chamber (1), an intake valve (2), and a discharge valve (3), the valves (2,3) are etched out of silicon wafers (4,5). The gas in the working chamber (1) is heated by a heating element (6), so that an overpressure is produced in the working chamber. A partial vacuum is created by cooling the gas in the working chamber (1). The pump action of the micropump is achieved through the succession of overpressure and partial-vacuum cycles.
336 Citations
11 Claims
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1. A micropump comprising:
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a first plate constructed of silicon forming a first part of a chamber; a second plate constructed of silicon forming a second part of the chamber and coupled to the first plate; the chamber including an intake valve at a first location of the chamber for movement between a first position for allowing fluid to flow into the chamber and a second position for preventing fluid from flowing into the chamber; the chamber further including a discharge valve at a second location of the chamber for movement between a third position for allowing fluid to flow out of the chamber and a fourth position for preventing fluid from flowing out of the chamber; and a heating element member forming a third part of the chamber for controlling a temperature of fluid in the chamber, the heating element member including a carrier and a heating element; wherein the intake and discharge valves are formed out of the first and second plates, and wherein the carrier is coupled to the first plate, with the carrier supporting the heating element at a first surface of the carrier and having a lower thermal capacity and a lower thermal conductivity at the first surface of the carrier than at a remainder of the carrier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification