Process for mass producing high frequency crystal resonators

• US 5,376,221 A
• Filed: 11/06/1992
• Issued: 12/27/1994
• Est. Priority Date: 11/06/1992
• Status: Expired due to Fees

• Current Assignee: Pericom Semiconductor Corporation (Diodes Incorporated)
• Original Assignee: Avancer Technologies Incorporated
• Inventors: Staudte, Juergen H.
• Primary Examiner(s): Powell, William A.
• Application Number:
  US07/973,820
• Time in Patent Office: 781 Days
• Field of Search: 156/626, 156/627, 156/630, 156/633, 156/634, 156/645, 156/647, 156/651, 156/656, 156/657, 156/659.1, 156/663, 331/68, 331/108 R, 331/116 R, 331/158, 331/187, 29/25.35, 310/348
• US Class Current: 216/2
• CPC Class Codes: H03H 3/04 for obtaining desired frequency or temperature coefficient

Abstract

A process for making a plurality of quartz thickness shear resonators with resonating means for use in high frequency oscillators with operating frequencies of 30 MHz or greater. The invention includes grinding a single crystal quartz wafer to achieve a highly uniform thickness, thus enhancing uniformity of the resonators produced. The invention also includes etching the quartz wafer to form a plurality of resonators, each having a support structure and a much thinner etched resonating membrane cantilevered at the support structure. In addition, the design of the support structure is such that a sloped edge occurs during membrane etching between the support structure and the membrane, thus facilitating the application of electrodes extending from the support structure to the membrane. Yet another aspect of the invention is to perform a fine-tune etching during the formation and tuning of the resonating membranes, thus further enhancing the uniformity of the resonator frequencies across the wafer.

Claims

1. In a process for producing a plurality of high frequency crystal resonators from a resonating material, the step of:

etching the resonating material to form a cantilevered resonating membrane on a region of each resonator bordered by at least one thicker support structure.

2. The process of claim 1 further comprising before said step, the steps of:

mounting a wafer of resonating material to a flat surface; and

thereafter

lapping and polishing the wafer to uniform thickness.

3. The process of claim 1 further including:

measuring each resonator to determine its frequency;

identifying resonators with frequencies falling within a predetermined acceptable frequency range; and

breaking the resonators having frequencies within said range out of the wafer.

4. The process of claim 1 wherein the resonating material is single crystal quartz cut in a crystallographic orientation which enhances thickness shear modes of resonance.

5. The process of claim 2 further including the steps of coating the wafer with conductive metal and etching the conductive metal to define a plurality of resonator patterns and etching the resonating material along said patterns to define a plurality of resonators.

6. The process of claim 5 wherein said conductive material is gold.

7. The process of claim 1, wherein the step of etching the resonating material to form a resonating membrane further comprises shaping the support structure so that at least one edge between the support structure and the resonating membrane is sloped.

8. The process of claim 7, further comprising shaping the support structure in a U-shape so that the resonating membrane is cantilevered at the open end of the U and at least one edge between the support structure and the resonating membrane is sloped.

9. The process of claim 7, further comprising applying on each resonator a pair of electrodes respectively on opposing sides of the resonator, each electrode extending from the support structure to the resonating membrane over a sloped edge.

10. The process of claim 2 wherein mounting the resonating material to a flat surface comprises mounting the resonating material to a highly polished glass surface.

11. In a process for producing a plurality of high frequency crystal resonators, the steps of:

defining a plurality of resonators having resonator membranes on a wafer of resonating material;

probing each resonating membrane to measure its frequency;

determining the deviation of the measured frequency from a desired frequency;

calculating an etching time for each resonator from the measured deviation; and

etching each membrane for the calculated etching time to fine-tune its frequency to the desired frequency, thereby increasing the uniformity of frequencies of resonators defined within the wafer.

12. The process of claim 11 further comprising:

grinding a wafer of resonating material to uniform thickness;

coating the wafer with conductive metal and etching the conductive metal to define a plurality of resonator patterns;

etching the resonating material along the resonator patterns to define a plurality of resonators;

etching the resonating material to carve a resonating membrane on a region of each resonator bordered by at least one thicker support structure;

applying resonating means to each resonator;

measuring each resonator to determine its membrane-plus-resonating-means frequency;

identifying resonators with frequencies falling within a predetermined acceptable frequency range; and

breaking the resonators having frequencies within said range out of the wafer.

13. The process claim 12 including the further step of:

fine-tuning each resonator by mass loading the membrane with additional material.

14. The process of claim 11 wherein the resonating material is quartz crystal.

15. The process of claim 12, wherein the step of etching the resonating material to carve out a resonating membrane further comprises shaping the support structure so that at least one edge between the support structure and the resonating membrane is sloped.

16. The process of claim 15, further comprising shaping the support structure in a U-shape so that the resonating membrane is cantilevered at the open end of the U and at least one edge between the support structure and the resonating membrane is sloped.

17. The process of claim 15, further comprising applying on each resonator a pair of electrodes respectively on opposing sides of the resonator, each electrode extending from the support structure to the resonating membrane over a sloped edge.

22. The process of claim 12 wherein the step of etching the resonating material along the resonator patterns to define a plurality of resonators comprises chemically etching the resonating material.

18. In a process for producing a plurality of high frequency crystal resonators, the steps of:

grinding a wafer of resonating material to uniform thickness;

measuring the wafer to detect nonuniformities in thickness, then fine-grinding the wafer to correct for detected nonuniformities;

coating the wafer with conductive metal and etching the conductive metal to define a plurality of resonator patterns;

etching the resonating material along the resonator patterns to define a plurality of resonators;

etching the resonating material to carve on each resonator a resonating membrane cantilevered from a thicker support structure;

probing each resonator membrane to measure its frequency and to determine the deviation of the measured frequency from a desired frequency;

calculating an etching time for each resonator from the determined deviation;

etching each membrane for the calculated etching time to fine-tune its frequency to the desired frequency, thereby increasing the uniformity of frequencies resonators defined within the wafer;

applying resonating means to each resonator;

measuring each resonator to determine its frequency;

identifying resonators having frequencies falling within a predetermined acceptable frequency range; and

breaking the resonators out of the wafer.

19. The process of claim 18 wherein the resonating material is single crystal quartz.

20. The process of claim 18 wherein the steps of coating the wafer with conductive metal and etching the conductive metal to define a plurality of resonator patterns comprise coating the wafer with gold and etching the gold to define a plurality of resonator patterns.

21. The process of claim 20 further comprising applying an adhesion layer in combination with the gold, thereby improving the adhesion of gold to the resonating material.

23. The process of claim 18 wherein the step of etching the resonating material to carve out a resonating membrane comprises chemically etching the resonating material.

24. The process of claim 18, wherein the step of etching the resonating material to carve out a resonating membrane further comprises shaping the support structure so that at least one edge between the support structure and the resonating membrane is sloped.

25. The process of claim 24, further comprising shaping the support structure in a U-shape so that the resonating membrane is cantilevered at the open end of the U and at least one edge between the support structure and the resonating membrane is sloped.

26. The process of claim 24, further comprising applying a pair of electrodes respectively on opposing sides of each resonator, each electrode extending from the support structure to the resonating membrane over a sloped edge.