Dual coaxial magnetic couplers for vacuum chamber robot assembly

• US 5,376,862 A
• Filed: 01/28/1993
• Issued: 12/27/1994
• Est. Priority Date: 01/28/1993
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Stevens, Craig L.
• Primary Examiner(s): Picard, Leo P.
• Assistant Examiner(s): Barrera, Ramon M.
• Application Number:
  US08/010,377
• Time in Patent Office: 698 Days
• Field of Search: 310/75 D, 310/86, 310/90.5, 310/103, 310/104, 464/29, 335/302-306
• US Class Current: 310/75.00D
• CPC Class Codes: H02K 49/106 with a radial air gap
• CPC Class Codes: H02K 5/128 using air-gap sleeves or air-gap discs

Abstract

A compact assembly of two magnetic couplers for coupling two coaxial angular shaft movements through a vacuum barrier. Each coupler includes two concentric rings of radially oriented magnets, arranged to provide magnetic coupling in a radial direction between corresponding magnets in the rings. A relatively large number of magnets in each ring ensures stiff coupling between rings, but unwanted circumferential coupling between adjacent magnets in each ring is minimized by the presence of a flux ring associated with each ring of magnets. The flux rings provide a return path for radial magnetic flux lines between the rings. Cross-coupling between the couplers is minimized by the presence of a magnetic shield on each ring of magnets. The shields permit the couplers to be located in close proximity on their common axis of rotation. For corrosion resistance, each ring of magnets on the vacuum side of the barrier is housed in a stainless steel enclosure.

Claims

1. A dual magnetic coupler mechanism, comprising:

a first coupler, having a primary ring of magnets and a secondary ring of magnets, said secondary ring concentric with and generally coplanar with the primary ring, each ring being mounted for rotation about a common axis, and each ring containing a plurality of radially oriented magnets, wherein magnets in the primary ring are magnetically coupled, in a radial sense, with corresponding magnets in the secondary ring;

a second coupler similar to the first coupler, also having a primary ring of magnets and a secondary ring of magnets, said secondary ring concentric with and generally coplanar with the primary ring, each ring of the second coupler being mounted for rotation about the same common axis as the first coupler, and each ring containing a plurality of radially oriented magnets, wherein the second coupler is closely spaced, axially, with respect to the first coupler;

means for minimizing unwanted circumferential coupling between adjacent magnets in any of the rings; and

means for minimizing cross-coupling between adjacent magnets in different primary or secondary rings;

wherein strong magnetic coupling is provided for the first and second coaxial couplers, with minimal unwanted circumferential coupling or cross-coupling.

2. A dual magnetic coupler mechanism as defined in claim 1, wherein:

the magnets in each primary and secondary ring have alternating magnetic polarities from one magnet position to the next;

the primary and secondary rings of magnets are located on opposite sides of a vacuum barrier; and

the means for minimizing unwanted circumferential coupling between adjacent magnets in the same ring includes an annular flux path ring located adjacent to the magnets in each primary and secondary ring, in close proximity to ends of the magnets furthest from the vacuum barrier;

wherein the annular flux path rings provide a low-reluctance flux path for radial magnetic coupling across the vacuum barrier, and minimize unwanted circumferential coupling at the ends of the magnets closest to the vacuum barrier.

3. A dual magnetic coupler mechanism as defined in claim 1, wherein the means for minimizing cross-coupling includes:

in each of the primary and secondary rings of magnets, an annular magnetic shield installed in close proximity to the magnets in the ring, and in a position closest to the other of the couplers;

wherein each magnetic shield provides a flux path for magnetic flux lines that would, in the absence of the annular magnetic shield, result in unwanted cross-coupling between the two couplers.

4. A dual magnetic coupler mechanism as defined in claim 2, wherein the means for minimizing cross-coupling includes:

in each of the primary and secondary rings of magnets, an annular magnetic shield installed in close proximity to the magnets in the ring, and in a position closest to the other of the couplers;

wherein each magnetic shield provides a flux path for magnetic flux lines that would, in the absence of the annular magnetic shield, result in unwanted cross-coupling between the two couplers.

5. A dual magnetic coupler mechanism as defined in claim 1, wherein:

the primary and secondary rings are located on opposite sides of a vacuum barrier;

the rings located on the vacuum side of the barrier include a protective covering to minimize the effect of corrosive substances that contaminate the vacuum.

6. A dual magnetic coupler mechanism as defined in claim 5, wherein:

the protective covering is of stainless steel.

7. A dual magnetic coupler mechanism as defined in claim 2, wherein:

the first coupler further includes means for connecting the first primary ring to a first drive motor and means for connecting the first secondary ring to a two-axis robot on the vacuum side of the vacuum barrier; and

the second coupler further includes means for connecting the second primary ring to a second drive motor and means for connecting the second secondary ring to the two-axis robot.

8. A dual magnetic coupler mechanism as defined in claim 7, wherein:

the means for connecting the first primary ring to the first drive motor includes a shaft on which the first primary ring is mounted; and

the means for connecting the second primary ring to the second drive motor includes a cylindrical bushing mounted for rotation on the shaft, and on which the second primary ring is mounted.