Reflecting diffraction grating and device, such as encoder or the like, using the same
First Claim
Patent Images
1. A reflecting diffraction grating comprising:
- a glass substrate;
a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function;
a metal reflecting film on the projections and recesses; and
an SiO film on said metal reflecting film.
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Abstract
A reflecting diffraction grating is formed by depositing a metal in vacuum on a blazed diffraction grating having a cross section of regular projections and recesses to provide a metal reflecting film, and forming an SiO protective film on the reflecting film by vacuum deposition.
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Citations
35 Claims
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1. A reflecting diffraction grating comprising:
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a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A scale comprising:
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a reflecting diffraction grating including; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film.
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8. A method of producing a reflecting diffraction grating comprising the steps of:
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preparing a glass substrate; forming a resin layer on said glass substrate, which has a configuration of projections and recesses in order to form a diffraction grating and is substantially thinner than said glass substrate; depositing a metal in vacuum on said projections and recesses of said diffraction grating to provide a metal reflecting film; and forming an SiO film on said metal reflecting film. - View Dependent Claims (9, 10, 11, 12)
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13. An optical apparatus comprising:
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a reflecting diffraction grating; and optical means for guiding light onto said diffraction grating, said reflecting diffracting grating comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film. - View Dependent Claims (14, 15)
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16. A displacement detector comprising:
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a scale comprising a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film. - View Dependent Claims (17, 18)
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19. A linear encoder comprising a displacement detector which includes:
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a scale with a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
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20. A rotary encoder comprising a displacement detector which includes:
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a scale with a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprising projections and recesses; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
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21. A driving system comprising:
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a driving mechanism; and a displacement detector for detecting a driving state of said driving mechanism, said displacement detector comprising; a scale comprising a reflecting diffraction grating; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film. - View Dependent Claims (22)
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23. A reflecting diffraction grating comprising;
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a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film formed on the projections and recesses; and a film including an oxide of an Si element except SiO2 on said metal reflecting film.
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24. A method of producing a reflecting diffraction grating comprising the steps of:
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preparing a glass substrate; forming a resin layer on said glass substrate having projections and recesses to provide a diffraction grating that is substantially thinner than said glass substrate; depositing a metal on said projections and recesses of said diffraction grating in a vacuum to provide a metal reflecting film; and forming a film including an oxide of an Si element except SiO2 on said metal reflecting film.
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25. A displacement detector comprising:
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a scale comprising a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detecting means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film formed on said projections and recesses and a film including an oxide of an Si element except SiO2 on said metal reflecting film.
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26. A reflecting diffraction grating comprising:
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a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and has a configuration of projections and recesses in order to form a diffraction grating; a metal reflecting film formed along the configuration of said resin layer; and an SiO film on said metal reflecting film. - View Dependent Claims (27, 28, 29, 30)
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31. A method of producing a reflecting diffraction grating comprising the steps of:
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preparing a glass substrate; forming a resin layer on said glass substrate that is substantially thinner than said glass substrate and has a configuration of projections and recesses in order to form a diffraction grating; depositing a metal in vacuum along the configuration of said resin layer to form a metal reflecting film; and forming an SiO film on said metal reflecting film. - View Dependent Claims (32, 33, 34, 35)
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Specification