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Rotational vibration gyroscope

  • US 5,377,544 A
  • Filed: 12/19/1991
  • Issued: 01/03/1995
  • Est. Priority Date: 12/19/1991
  • Status: Expired due to Term
First Claim
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1. A rotational vibration gyroscope comprising:

  • a base with a generally planar upper surface;

    a mounting post fixedly attached to the base and defining a first axis;

    a mass including a generally disk shaped layer of semiconductor material lying in a plane parallel to and spaced from the planar upper surface of the substrate and positioned in a plane perpendicular to the post;

    springs affixed at one end to the post and at another end to the mass, and mounting the mass for oscillatory rotary movement about the post;

    oscillatory motion driving apparatus mounted adjacent to the mass for causing the mass to move in an oscillatory rotary motion about the first axis; and

    sensing apparatus, positioned adjacent to the mass and defining second and third axes mutually perpendicular to each other and to the first axis, for sensing movement of the disk about the third axis in response to movement of the gyroscope about the second axis, the sensing apparatus including first plates positioned in parallel to and adjacent the mass for sensing movement about the third axis in response to movement of the gyroscope about the second axis and second plates positioned in parallel to and adjacent the mass for sensing movement about the second axis in response to movement of the gyroscope about the third axis.

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