Process for removing gaseous hydrides from a solid support comprising metallic oxides

• US 5,378,439 A
• Filed: 07/16/1992
• Issued: 01/03/1995
• Est. Priority Date: 09/22/1989
• Status: Expired due to Fees

• Current Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Original Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Inventors: Louise, Jean, Cornut, Philippe, Delobel, Olivier
• Primary Examiner(s): Straub, Gary P.
• Assistant Examiner(s): DI MAURO, PETER T
• Application Number:
  US07/914,215
• Time in Patent Office: 901 Days
• Field of Search: 423/210, 423/230, 55/68, 55/72, 95/116, 95/136
• US Class Current: 423/210
• CPC Class Codes: B01D 53/8671 Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668

Abstract

The invention concerns a process for removing gaseous hydrides from a solid support of metallic oxides, which consists in causing a gas flow to circulate, at room temperature, on a solid support comprising at least copper and chromium and having a specific area lower than or equal to 100 m² /g. This process may be used for the destruction of gaseous hydrides from the industry of semi-conductors, for example silanes, arsine, phosphine, diborane, germane, stannane, gallane, stibine, and hydrogen telluride, selenide and sulfide.

Claims

1. Process for removing gaseous inorganic hydrides from a gas stream, comprising circulating a gas flow containing the hydrides diluted in an inert gas, on a solid support consisting essentially of metallic oxides of manganese, copper and chromium, and having a specific area lower than or equal to 100 m² /g, said solid support having from 2.5 to 5 weight % Mn, 25 to 70 weight % Cu, and 15 to 40 weight % Cr, and wherein said hydrides are selected from the group consisting of silanes, phosphine, diborane, germane, stannane, gallane, hydrogen telluride and hydrogen selenide.

2. Process according to claim 1, wherein the inert gas is nitrogen.

3. Process according to claim 1, wherein the volume concentration of the hydrides in the gas flow is comprised between 1 and 10 volume %.

4. Process according to claim 1, wherein the volume concentration of the hydrides in the gas flow is comprised between 5 and 10 volume %.

5. Process according to claim 1, and subjecting the solid support to at least one regeneration cycle.

6. Process according to claim 5, wherein the regeneration is carried out by exposing the solid support to a gas flow containing 1 to 5 volume % oxygen.

7. Process for removing gaseous inorganic hydrides from a gas stream, comprising circulating a gas flow containing from 2.5 to 10 volume % of the hydrides diluted in an inert gas, on a solid support consisting essentially of metallic oxides of copper, chromium, barium and manganese said manganese being present in an amount from 2.5 to 5 weight %, and having a specific area lower than or equal to 100 m² /g.

8. Process according to claim 7, wherein the solid support comprises at most 15 weight % barium.

9. Process according to claim 7, wherein the inert gas is nitrogen.

10. Process according to claim 7, wherein the gaseous hydrides are selected from the group consisting of silanes, arsine, phosphine, diborane, germane, stannane, gallane, stibine, hydrogen telluride, hydrogen selenide and hydrogen sulfide.

11. Process according to claim 7, wherein the gaseous hydrides are selected from the group consisting of silanes, phosphine, diborane, germane, stannane, gallane, hydrogen telluride and hydrogen selenide.

12. Process according to claim 11, wherein the gaseous hydride is SiH₄.

13. Process according to claim 7, wherein the concentration of the hydrides in the gas flow is comprised between 5 and 10 volume %.

14. Process according to claim 7, and subjecting the solid support to at least one regeneration cycle.

15. Process according to claim 14, wherein the regeneration is carried out by exposing the solid support to a gas flow containing 1 to 5 volume % oxygen.

16. Process for removing gaseous inorganic hydrides from a gas stream, comprising circulating a gas flow containing from 1 to 10 volume % of the hydrides diluted in an inert gas, on a solid support consisting essentially of metallic oxides of copper, chromium, barium and manganese said manganese being present in an amount from 2.5 to 5 weight %, and having a specific area lower than or equal to 100 m² /g, said hydrides being selected from the group consisting of silanes, phosphine, diborane, germane, stannane, gallane, hydrogen telluride and hydrogen selenide.

17. Process according to claim 16, wherein the inert gas is nitrogen.

18. Process according to claim 16, wherein the volume concentration of the hydrides in the gas flow is comprised between 5 and 10 volume %.

19. Process according to claim 16, and subjecting the solid support to at least one regeneration cycle.

20. Process according to claim 19, wherein the regeneration is carried out by exposing the solid support to a gas flow containing 1 to 5 volume % oxygen.

21. Process for removing gaseous inorganic hydrides from a gas stream, comprising circulating a gas flow containing the hydrides diluted in an inert gas, on a solid support consisting essentially of metallic oxides of manganese, copper, chromium, and barium, and having a specific area lower than or equal to 100 m² /g, said solid support having from 2.5 to 5 weight % Mn, 25 to 70 weight % Cu, and 14 to 40 weight % Cr, and wherein said hydrides are selected from the group consisting of silanes, phosphine, diborane, germane, stannane, gallane, hydrogen telluride and hydrogen selenide.