Carbon film coated glass
First Claim
1. Carbon film coated glass, comprising:
- a glass substrate;
an intermediate layer formed on a surface of said glass substrate by physical vacuum deposition, said intermediate layer having a thickness of 50 angstroms or more and comprising carbon and 5 mole % or more of one or more metallic oxides, wherein said deposition is carried out by a process comprising applying to a carbon target a first electric power input which increases to a predetermined value over a period of time and applying to a metallic oxide target a second electric power input which decreases to a predetermined value over a period of time, the intermediate layer being formed predominantly of said one or more metallic oxides adjacent said glass substrate and having a metallic oxides content which decreases as the distance away from said glass substrate increases; and
a carbon film formed by physical vacuum deposition on said intermediate layer and having a thickness of 10 angstroms or more.
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Accused Products
Abstract
Carbon film coated glass is disclosed which includes a glass substrate, an intermediate layer formed on a surface of the glass substrate in a thickness of 50 angstroms or more and including metallic oxide in an amount of 5% or more by mole and balance of carbon at least, and a carbon film formed on a surface of the intermediate layer in a thickness of 10 angstroms or more. The intermediate layer closely binds the glass substrate and the carbon film together, and thereby it inhibits the carbon film from coming off. The carbon film coated glass is thus improved in the durability. Additionally, the carbon film can include fluorine which is combined with its surface at least, and thereby it improves the repellency of the carbon film coated glass as well as the transparency thereof.
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Citations
27 Claims
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1. Carbon film coated glass, comprising:
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a glass substrate; an intermediate layer formed on a surface of said glass substrate by physical vacuum deposition, said intermediate layer having a thickness of 50 angstroms or more and comprising carbon and 5 mole % or more of one or more metallic oxides, wherein said deposition is carried out by a process comprising applying to a carbon target a first electric power input which increases to a predetermined value over a period of time and applying to a metallic oxide target a second electric power input which decreases to a predetermined value over a period of time, the intermediate layer being formed predominantly of said one or more metallic oxides adjacent said glass substrate and having a metallic oxides content which decreases as the distance away from said glass substrate increases; and a carbon film formed by physical vacuum deposition on said intermediate layer and having a thickness of 10 angstroms or more. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. Carbon film coated glass, comprising:
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a glass substrate; an intermediate layer formed on a surface of said glass substrate by physical vacuum deposition, said intermediate layer having a thickness of 50 angstroms or more and comprising carbon and 5 mole % of one or more metallic oxides, wherein said deposition is carried out by a process comprising applying to a carbon target a first electric power input which increases to a predetermined value over a period of time and applying to a metallic oxide target a second electric power input which decreases to a predetermined value over a period of time, the intermediate layer being formed predominantly of said one or more metallic oxides adjacent said glass substrate and having a metallic oxides content which decreases as the distance away from said glass substrate increases; and a fluorine-containing carbon film formed by physical vacuum deposition on said intermediate layer and having a thickness of 10 angstroms or more and combined with fluorine at least at a surface thereof. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification