Laser discharge tube

• US 5,379,316 A
• Filed: 03/23/1993
• Issued: 01/03/1995
• Est. Priority Date: 07/29/1991
• Status: Expired due to Fees

• Current Assignee: Fanuc Ltd (Fanuc Corporation)
• Original Assignee: Fanuc Ltd (Fanuc Corporation)
• Inventors: Fujioka, Yoshiki, Manabe, Mitsuo, Karube, Norio
• Primary Examiner(s): Epps, Georgia Y.
• Application Number:
  US08/030,418
• Time in Patent Office: 651 Days
• Field of Search: 372/87, 372/88, 372/61
• US Class Current: 372/61
• CPC Class Codes: H01S 3/0387 Helical shape

Abstract

A laser discharge tube for preventing the flow out of an electrode material, deterioration of electrodes, and the like, caused by corona discharge, as well as for increasing power to be supplied to the laser discharge tube by improving the heat-dissipating property and insulating property of the electrodes. The laser discharge tube is a tube of a dielectric material (e.g., silica glass) with a circular cross section and two electrode units are helically disposed on the outside periphery thereof at the same pitch. The electrode units include electrodes and dielectric layers, respectively, and each of the electrodes is formed by depositing silver as an electric conductor on the outside periphery of the tube wall by metalizing. The dielectric layers are formed to cover the electrodes, respectively, and are disposed on the outside periphery of the tube wall by depositing a dielectric material such as a ceramic material, glass, resin or the like by spray coating, coating, baking or the like or by bonding independently formed dielectric materials to the electrodes. The dielectric layers have a thickness of about 0.1 mm-5 mm.

Claims

1. A laser discharge tube, containing a laser gas, for inducing a discharge in response to a high-frequency voltage applied thereto to excite the laser gas, said laser discharge tube comprising:

electrodes disposed on an outside periphery of the laser discharge tube; and

dielectric layers deposited on said electrodes, said dielectric layers being ceramic-deposited layers comprising a ceramic material having one of a low coefficient of thermal expansion and a negative coefficient of thermal expansion, and a binder which is a low melting point glass.

2. The laser discharge tube according to claim 1, wherein said ceramic material is a titanium composite oxide.

3. The laser discharge tube according to claim 2, wherein said titanium composite oxide is one of aluminum titanate and lead titanium.

4. The laser discharge tube according to claim 1, wherein said ceramic material is boron nitride.

5. The laser discharge tube according to claim 1, wherein said ceramic material is titanium composite oxide and boron nitride.

6. The laser discharge tube according to claim 1, wherein said ceramic-deposited-layers are mixed with one of silicon nitride and silicon carbide.

7. The laser discharge tube according to claim 1, wherein said binder has a mixing ratio of 50-90 wt %.

8. The laser discharge tube according to claim 1, wherein said ceramic-deposited layers are deposited on said electrodes by one of spray coating, coating and vapor deposition.

9. The laser discharge tube according to claim 1, wherein said ceramic-deposited layers comprise a material having a low coefficient of thermal expansion and a high coefficient of thermal conductivity.

10. The laser discharge tube according to claim 1, wherein said ceramic-deposited layers are independently formed and deposited by bonding.

11. The laser discharge tube according to claim 1, wherein said ceramic-deposited layers comprise a material having a high flowing property at a temperature above a melting point temperature of the material, and have a function to return to their original state.

12. The laser discharge tube according to claim 1, wherein said ceramic-deposited layers comprise a material having a melting point temperature lower than that of said electrodes and higher than a heat resistant temperature required by the discharge.

13. The laser discharge tube as claimed in claim 1, wherein said ceramic-deposited layers have a substantially equal coefficient of thermal expansion as that of the laser discharge tube.

14. The laser discharge tube as claimed in claim 1, wherein said electrodes are helically shaped about the outside periphery of the laser discharge tube.

15. A laser discharge tube, containing a laser gas, for inducing a discharge in response to a high-frequency voltage applied thereto to excite the laser gas, said laser discharge tube comprising:

electrodes disposed on an outside periphery of the laser discharge tube; and

dielectric layers deposited on said electrodes, said dielectric layers being ceramic-deposited layers comprising one of a titanium composite oxide and a composite ceramic material of titanium composite oxide, and magnesia, alumina.

16. The laser discharge tube according to claim 15, wherein tyranno-polymer (Si-C) is used as a binder to said ceramic-deposited layers.