Vacuum vapor deposition

• US 5,380,415 A
• Filed: 02/03/1994
• Issued: 01/10/1995
• Est. Priority Date: 02/03/1994
• Status: Expired due to Term

• Current Assignee: United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration
• Original Assignee: United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration
• Inventors: Poorman, Richard M., Weeks, Jack L.
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US08/191,309
• Time in Patent Office: 341 Days
• Field of Search: 118/723 VE, 204/298.41, 204/192.38, 427/580
• US Class Current: 204/192.38
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 37/32055 Arc discharge

Abstract

A method and apparatus for vapor deposition of a thin metallic film utilizing an ionized gas arc directed onto a source material spaced from a substrate to be coated in a substantial vacuum while providing a pressure differential between the source and the substrate so that as a portion of the source is vaporized the vapors are carried to the substrate. The apparatus includes a modified tungsten arc welding torch having a hollow electrode through which a gas, preferably inert, flows and an arc is struck between the electrode and the source. The torch, source and substrate are confined within a chamber within which a vacuum is draw. When the arc is struck, a portion of the source is vaporized and the vapors flow rapidly toward the substrate. A reflecting shield is positioned about the torch above the electrode and the source to ensure that the arc is struck between the electrode and the source at startup. The electrode and the source may be confined within a vapor guide housing having a duct opening toward the substrate for directing the vapors onto the substrate.

Claims

1. Apparatus for coating a thin metal film by depositing vapors from a source of the metal onto a substrate spaced from said source, said apparatus comprising an enclosed substantially sealed chamber, a gas tungsten arc welding torch including a torch body mounted within said chamber, an elongated hollow tungsten electrode carried within and electrically insulated from said body, said electrode having a tip disposed externally of said body, an elongated bore extending through said electrode from within said body and opening at said tip, means for supplying a gas to said torch communicating with said bore so that said gas flows out said tip, means for supplying electrical power to said electrode, support means for mounting said source spaced from said tip of said electrode for forming an electrical arc between said tip and said source and for impingement of said gas from said tip upon said source to vaporize a portion of said source, substrate mounting means for mounting said substrate spaced from said electrode and said source for receiving vapors from said source, a shield of electrically non-conductive material disposed about said torch spaced from said tip for reflecting and precluding an arc from forming between said tip and said torch when electrical power is initially supplied to said electrode to form an arc, and means for reducing the pressure within said chamber to a substantial vacuum.

2. Apparatus as recited in claim 1, wherein said shield has an arcuate configuration.

3. Apparatus as recited in claim 2, wherein said shield has a concave surface facing toward said source.

4. Apparatus as recited in claim 1, wherein said source is disposed within a vapor guide housing, said guide housing having a duct communicating with the interior of said guide housing, said duct including a mouth through which said gas and vapors may egress, and said mouth being disposed for directing said gas and vapors onto said substrate.

5. Apparatus as recited in claim 4, wherein the tip of said electrode and said source are disposed within said guide housing.

6. Apparatus as recited in claim 4, wherein said shield has an arcuate configuration.

7. Apparatus as recited in claim 6, wherein said shield has a concave surface facing toward said source.

8. Apparatus as recited in claim 7, wherein the tip of said electrode and said source are disposed within said guide housing.

9. A method of coating a thin film of metal released from a source of said metal onto the surface of a substrate, said method comprising:

mounting said source and said substrate in spaced apart disposition within an enclosed chamber, positioning a welding torch having a hollow electrode with a tip at a free end thereof within said chamber with said tip disposed adjacent said source, applying a gas through the hollow of said electrode directed onto said source, applying electrical power to said electrode to form an arc between the tip of the electrode and said source to vaporize a portion of said source, reducing the pressure within said chamber to sub-atmospheric pressure such that the pressure at said substrate is less than the pressure at the source and vapors released from said source flow onto said substrate.

10. In the method as recited in claim 9, wherein the flow rate of said gas through said electrode is of a magnitude to create a gas pressure at said source which is substantially greater than the pressure at said substrate, thereby resulting in a large pressure gradient between the source and the substrate.

11. In the method as recited in claim 10, wherein the velocity of the gas leaving the source is substantially sonic velocity.

12. In the method as recited in claim 10, wherein the pressure within said chamber is in the range of one to ten micron and the pressure of said gas at the surface of the source is approximately 500 micron.

13. In the method as recited in claim 10, wherein the spacing between said tip and said source is in the range of one to twenty millimeters.

14. In the method as recited in claim 13, wherein the pressure within said chamber is in the range of one to ten micron and the pressure of said gas at the surface of the source is approximately 500 micron.

15. In the method as recited in claim 14, wherein the velocity of the gas leaving the source is substantially sonic velocity.

16. In the method as recited in claim 9, including reflecting said arc upon start-up from a reflective shield constructed from electrically non-conductive material disposed about said torch spaced from said tip and said source onto said substrate.

17. In the method as recited in claim 9, including directing said gas and said vapors through a vapor guide housing onto said substrate.

18. In the method as recited in claim 16, wherein the flow rate of said gas through said electrode is of a magnitude to create a gas pressure at said source which is substantially greater than the pressure at said substrate, thereby resulting in a large pressure gradient between the source and the substrate.

19. In the method as recited in claim 17, wherein the flow rate of said gas through said electrode is of a magnitude to create a gas pressure at said source which is substantially greater than the pressure at said substrate, thereby resulting in a large pressure gradient between the source and the substrate.

20. In the method as recited in claim 19, wherein the pressure within said chamber is in the range of one to ten micron and the pressure of said gas at the surface of the source is approximately 500 micron.