X-ray imaging system and solid state detector therefor
First Claim
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1. An apparatus, comprising:
- a scintillator for converting impinging x-rays into visible light;
a sensor array having two opposed surfaces with a plurality of sensing cells and interconnect metallization on one of said surfaces and having the other of said surfaces facing said scintillator;
a plurality of integrated processing circuits having bond pads and mounted with interconnects to said interconnect metallization;
a ceramic layer patterned to overlay said integrated circuits and supporting interconnect conductors, said ceramic layer being attached to said interconnect metallization and said interconnect conductors being connected to said bond pads; and
means for causing said visible light to affect a charge on said sensing cells so that said impinging x-rays are sensed by said sensing cells.
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Abstract
An x-ray detector includes a scintillator, a sensor array, processing circuits, and a ceramic layer. The ceramic layer overlays the processing circuits. The pixel architecture of the detector utilizes a technique similar to a CCD array to shift date from the array. The pixel charges are read out in a quasi-random fashion. The detector preferably utilizes edge-to-edge sensor array having octagonal pixels with a high fill factor.
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Citations
14 Claims
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1. An apparatus, comprising:
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a scintillator for converting impinging x-rays into visible light; a sensor array having two opposed surfaces with a plurality of sensing cells and interconnect metallization on one of said surfaces and having the other of said surfaces facing said scintillator; a plurality of integrated processing circuits having bond pads and mounted with interconnects to said interconnect metallization; a ceramic layer patterned to overlay said integrated circuits and supporting interconnect conductors, said ceramic layer being attached to said interconnect metallization and said interconnect conductors being connected to said bond pads; and means for causing said visible light to affect a charge on said sensing cells so that said impinging x-rays are sensed by said sensing cells. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An apparatus, comprising:
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a scintillator for converting impinging x-rays into visible light; a sensor array having two opposed surfaces with a plurality of sensing cells adjacent to one of said surfaces and having the other of said surfaces facing said scintillator; a supporting backplane attached to said sensor array and supporting interconnect conductors; a plurality of discrete integrated processing circuits mounted over said sensing cells with first interconnects connected to said sensing cells and second interconnects connected to said interconnect conductors; and means for causing said visible light to affect a charge on said sensing cells so that said impinging x-rays are sensed by said sensing cells.
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Specification