X-ray imaging system and solid state detector therefor

• US 5,381,013 A
• Filed: 03/18/1993
• Issued: 01/10/1995
• Est. Priority Date: 12/11/1985
• Status: Expired due to Fees

• Current Assignee: General Imaging Company
• Original Assignee: General Imaging Company
• Inventors: Cox, John D., Langford, D. Scott
• Primary Examiner(s): Hannaher, Constantine
• Assistant Examiner(s): Glick, Edward J.
• Application Number:
  US08/035,344
• Time in Patent Office: 663 Days
• Field of Search: 250/366, 250/370.08, 250/370.09, 250/370.11, 250/367, 250/369, 257/228, 257/447
• US Class Current: 250/370.09
• CPC Class Codes: G01T 1/2006 using a combination of a scintillator and photodetector which measures the means radiation intensity
• CPC Class Codes: G01T 1/2928 using solid state detectors
• CPC Class Codes: H01L 27/14609 Pixel-elements with integrated switching, control, storage or amplification elements scanning details of imagers (circuitry of solid-state image sensors H04N25/00); circuitry of imagers H04N25/70
• CPC Class Codes: H01L 27/14663 Indirect radiation imagers, e.g. using luminescent members
• CPC Class Codes: H04N 3/155 Control of the image-sensor operation, e.g. image processing within the image-sensor
• CPC Class Codes: H04N 5/32 Transforming X-rays cameras or camera modules for generating image signals from X-rays H04N23/30; circuitry of SSIS for transforming X-rays into image signals H04N25/30

Abstract

An x-ray detector includes a scintillator, a sensor array, processing circuits, and a ceramic layer. The ceramic layer overlays the processing circuits. The pixel architecture of the detector utilizes a technique similar to a CCD array to shift date from the array. The pixel charges are read out in a quasi-random fashion. The detector preferably utilizes edge-to-edge sensor array having octagonal pixels with a high fill factor.

Claims

1. An apparatus, comprising:

a scintillator for converting impinging x-rays into visible light;

a sensor array having two opposed surfaces with a plurality of sensing cells and interconnect metallization on one of said surfaces and having the other of said surfaces facing said scintillator;

a plurality of integrated processing circuits having bond pads and mounted with interconnects to said interconnect metallization;

a ceramic layer patterned to overlay said integrated circuits and supporting interconnect conductors, said ceramic layer being attached to said interconnect metallization and said interconnect conductors being connected to said bond pads; and

means for causing said visible light to affect a charge on said sensing cells so that said impinging x-rays are sensed by said sensing cells.

2. An apparatus as claimed in claim 1, wherein said interconnect conductors include layers of metalized wiring channels on a surface of said ceramic layer which are connected to external signals.

3. An apparatus as claimed in claim 1, wherein the bond pads extend beyond said processing circuits and include bump bonds connected to said bond pads.

4. An apparatus as claimed in claim 1, wherein the sensor array includes a plurality of pixels and the apparatus further comprises a pre-processor circuit which contains a look-up table (LUT) which contains values which when added to a signal from the sensor array normalize the response of each pixel in relation to each other.

5. An apparatus as claimed in claim 1, further including peripheral I/O circuitry and structure located interstitially among said sensing cells to provide edge to edge detection.

6. An apparatus as claimed in claim 5, wherein the plurality of sensing cells are interconnected in neighborhoods and wherein said sensor array further includes clock inputs for horizontal and vertical clocks and a single gain/buffer stage such that the neighborhoods are addressed by horizontal and vertical clocking schemes and share the single gain/buffer stage.

7. An apparatus as claimed in claim 5, wherein said sensor array includes a transfer gate as a read out register.

8. An apparatus as claimed in claim 5, wherein the plurality of sensing cells are interconnected in pixel neighborhoods and further including transfer gates and a decoder circuit between the pixel neighborhoods for rerouting pixel charge to bypass defective readout circuitry.

9. An apparatus as claimed in claim 5, wherein said sensor array includes a pixel architecture including pixels having an octagonal pixel shape which provides for high fill factor and excess area for peripheral circuitry.

10. An apparatus as claimed in claim 9, wherein said sensor array includes clock inputs for horizontal and vertical clocks and wherein charge from several pixels is added together by altering the rates of the vertical and horizontal clocking thus producing a lower resolution image and pixels with greater full well charge capacity.

11. An apparatus as claimed in claim 9, further including two transfer gates and a decoder/enable circuit with an additional readout gain/buffer stage to allow bi-directional transfer of charge from the pixels.

12. An apparatus as claimed in claim 5, wherein the plurality of sensing cells are interconnected in pixel neighborhoods and further including means for comparing a charge from a single pixel in each neighborhood to a pre-set value.

13. An apparatus as claimed in claim 12, further including a comparator for providing a control signal for control of a start of an exposure cycle based on the comparison of a signal from the pixel to the pre-set value.

14. An apparatus, comprising:

a scintillator for converting impinging x-rays into visible light;

a sensor array having two opposed surfaces with a plurality of sensing cells adjacent to one of said surfaces and having the other of said surfaces facing said scintillator;

a supporting backplane attached to said sensor array and supporting interconnect conductors;

a plurality of discrete integrated processing circuits mounted over said sensing cells with first interconnects connected to said sensing cells and second interconnects connected to said interconnect conductors; and

means for causing said visible light to affect a charge on said sensing cells so that said impinging x-rays are sensed by said sensing cells.