Three-dimensional shape measuring device and three-dimensional shape measuring sensor

• US 5,381,235 A
• Filed: 12/15/1992
• Issued: 01/10/1995
• Est. Priority Date: 12/26/1991
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Inoue, Yasuo, Iwamatsu, Toshiaki, Ipposhi, Takashi, Nishimura, Tadashi
• Primary Examiner(s): Rosenberger, Richard A.
• Application Number:
  US07/990,460
• Time in Patent Office: 756 Days
• Field of Search: 356/376, 307/234, 307/353, 328/129.1, 368/121
• US Class Current: 356/606
• CPC Class Codes: G01B 11/024 by means of diode-array scanning
• CPC Class Codes: G01B 11/2518 Projection by scanning of the object

Abstract

The present invention provides a three-dimensional shape measuring device and a sensor employed for the three-dimensional shape measuring device. The three-dimensional shape measuring device comprises a light source for scanning plane light over the surface of an object, an image sensor opposed to the object and provided with a plurality of pixels, an optical system for forming an image of a bright line appearing on the surface of the object due to plane light on the image sensor, a plurality of capacitors installed in association with pixels of the image sensor, a charger for storing given charges in a plurality of capacitors before plane light scanning starts, a plurality of dischargers lying in association with capacitors and gradually discharging the capacitors for pixels corresponding to a bright line image from when plane light scanning starts until the bright line image passes through the pixels, and an arithmetic logic means for computing charges remaining in the plurality of capacitors after plane light scanning is completed and thus providing a three-dimensional shape of an object. Thereby, a three-dimensional shape of an object can be measured at a high speed with high precision.

Claims

1. A three-dimensional shape measuring device, comprising:

a light source for scanning plane light over the surface of an object;

an optical system for forming an image of a bright line appearing on the surface of an object;

a plurality of shape measurement units, each shape measurement unit including an image sensor opposed to the object and;

defining a pixel, a capacitor having a first grounded terminal and a second terminal, discharging means connected to the capacitor for gradually discharging the capacitor from when plane light scanning starts until the bright line image passes through the pixel, the discharging means having

     1) a discharge resistor including a first grounded terminal and a second terminal and

     2) a plurality of interconnected discharge switching transistors, one of the discharge switching transistors having a gate and being connected to the second terminal of the discharge resistor and the second terminal of the capacitor; and

an arithmetic logic means for computing charges remaining in said plurality of capacitors after plane light scanning is completed thus providing a three-dimensional shape of an object.

2. A three-dimensional shape measuring device according to claim 1 wherein said light source includes a laser source and a rotary mirror for reflecting a laser beam emitted frown the laser source, the rotary mirror rotating at a given angular speed.

3. A three-dimensional shape measuring device according to claim 1 wherein said charging means includes power lines and a plurality of charge switching transistors connected between the power lines and their associated capacitors.

4. A three-dimensional shape measuring device according to claim 1 wherein said image sensor includes a photosensor forming a pixel, a level slicer connected to the photosensor, and a flip-flop having an input terminal connected to the level slicer and an output terminal connected to the gate of the discharge switching transistor connected between the resistor and the capacitor.

5. A three-dimensional shape measuring device, comprising:

a light source for scanning plane light over the surface of an object;

an optical system for forming an image of a bright line appearing on the surface of an object;

a plurality of shape measurement units, each shape measurement unit including an image sensor opposed to the object and defining a pixel, a capacitor having a first grounded terminal and a second terminal,

a discharging means for discharging said capacitor before plane light scanning starts, charging means for gradually charging the capacitor from when plane light scanning starts until the bright line image passes through the pixel, the charging means including a switching transistor having first and second terminal and a gate the first terminal being connected to a power line, and a resistor connected to the switching transistor and to the capacitor; and

an arithmetic logic unit for computing charges existent in the capacitor after plane light scanning is completed thus providing a three-dimensional shape of an object.

6. A three-dimensional shape measuring device according to claim 5 wherein said light source includes a laser source and a rotary mirror for reflecting a laser beam emitted from the laser source, the rotary mirror rotating at a given angular speed.

7. A three-dimensional shape measuring device according to claim 5 wherein said discharging means includes a discharge switching transistor having first and second terminals and a gate, the first terminal being grounded and the second terminal being connected to the second terminal of the capacitor.

8. A three-dimensional shape measuring device according to claim 5 wherein said image sensor includes a photosensor, a level slicer connected to the photosensor, and a flip-flop having an input terminal connected to the level slicer and an output terminal connected to the gate of the charge switching transistor.

9. A three-dimensional shape measuring sensor, comprising:

a plurality of photosensors arranged in two-dimensional order;

a plurality of capacitors connected in association with said plurality of photo sensors;

a plurality of charging means for storing given charges in said plurality of capacitors;

a plurality of discharging means for discharging said plurality of capacitors gradually;

a discharge stopping means for stopping discharging means to discharge their associated capacitors according to the output signals sent from their associated photosensors; and

a plurality of reading means for reading charges remaining in said plurality of capacitors;

a two-layer structure being adopted so that said photosensors will lie in the first layer, and said capacitors, said charging means, said discharging means, said discharge stopping means, and said reading means will lie in the second layer.

10. A three-dimensional shape measuring sensor according to claim 9 wherein said charging means include charge switching transistors connected between their associated capacitors and power lines.

11. A three-dimensional shape measuring sensor according to claim 9 wherein said discharging means include discharge resistors having their terminals grounded and discharge switching transistors connected between the other terminals of the discharge resistors and their associated capacitors.

12. A three-dimensional shape measuring sensor according to claim 9 further comprising a plurality of level slicers connected to their associated photosensors, and a plurality of flip-flops having their input terminals connected to the level slicers and their output terminals connected to the gates of their associated discharge switching transistors.

13. A three-dimensional shape measuring sensor, comprising:

a plurality of photosensors arranged in two-dimensional order;

a plurality of capacitors installed in association with said photosensors;

a plurality of discharging means for discharging said plurality of capacitors gradually;

a charge stopping means for stopping said charging means to charge their associated capacitors according to the output signals of their associated photosensors; and

a plurality of reading means For reading charges stored in said capacitors;

a two-layer structure being adopted so that said photosensors will lie in the first layer, and said discharging means, said charging means, said charge stopping means, and said reading means will lie in the second layer.

14. A three-dimensional shape measuring sensor according to claim 13 wherein said discharging means include discharge switching transistors having their terminals grounded and the other terminals connected to their associated capacitors.

15. A three-dimensional shape measuring sensor according to claim 14 wherein said charging means includes series combinations connected between their associated capacitors and power lines, and made up of discharge switching transistors and discharge resistors.

16. A three-dimensional shape measuring sensor according to claim 15 further comprising a plurality of level slicers connected to their associated photosensors and a plurality of flip-flops having their input terminals connected to their associated level slicers and their output terminals connected to the gates of their associated charge switching transistors.