Ceramic-titanium nitride electrostatic chuck

• US 5,382,469 A
• Filed: 06/03/1993
• Issued: 01/17/1995
• Est. Priority Date: 06/26/1992
• Status: Expired due to Term

• Current Assignee: Shin-Etsu Chemical Company Limited
• Original Assignee: Shin-Etsu Chemical Company Limited
• Inventors: Kojima, Shinji, Arai, Ken-ichi, Kawai, Makoto, Kubota, Yoshihiro
• Primary Examiner(s): Nakarani, D. S.
• Assistant Examiner(s): Sand, Stephen
• Application Number:
  US08/072,233
• Time in Patent Office: 593 Days
• Field of Search: 428/469, 428/332, 428/336, 428/446, 428/450, 361/230, 361/233, 361/234, 501/103, 501/127, 501/134, 501/153, 501/96, 279/128
• US Class Current: 428/332
• CPC Class Codes: C04B 35/117 Composites
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means
• CPC Class Codes: Y10T 428/26 Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

Abstract

Proposed is a ceramic-made electrostatic chuck consisting of two insulating ceramic layers and a metallic electrode layer integrally sandwiched between the two insulating layers, which has a very quick response characteristic to turning-on and -off of the electric voltage applied to the electrodes without affecting the very high electrostatic attracting force. This improvement can be obtained by forming the insulating ceramic layers from a specific ceramic material consisting of a highly resistive ceramic material such as alumina and the like and titanium nitride admixed with the former in an amount not exceeding 5% by weight but sufficient to impart the insulating ceramic layers with a volume resistivity in the range from 1×10⁸ to 1×10¹³ ohm.cm at 20° C.

Claims

1. A ceramic electrostatic chuck which comprises:

two insulating layers made from a ceramic material and an electrode layer made from a metal and integrally sandwiched between the insulating layers;

the ceramic material consisting of a mixture of a resistive ceramic material having a volume resistivity of at least 1×

10¹⁴ ohm.cm at 20°

C. and means to provide the ceramic material of the insulating layers with a volume resistivity in the range from 1×

10⁸ to 1×

10¹³ ohm.cm at 20°

C., said means being titanium nitride, the amount of titanium nitride not exceeding 5% by weight based on the amount of the resistive ceramic material.

2. The ceramic electrostatic chuck as claimed in claim 1 in which the resistive ceramic material is selected from the group consisting of aluminum oxide, aluminum nitride, zirconium oxide, silicon dioxide, and boron nitride.

3. The ceramic electrostatic chuck as claimed in claim 1 in which one of the two insulating layers has a thickness in the range from 0.3 to 1.0 mm and the other of the two insulating layers has a thickness in the range from 0.5 to 25 mm.