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Apparatus and method for optically controlling the output energy of a pulsed laser source

  • US 5,383,199 A
  • Filed: 07/02/1992
  • Issued: 01/17/1995
  • Est. Priority Date: 07/02/1992
  • Status: Expired due to Term
First Claim
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1. In an apparatus using a pulsed laser source, an ultraviolet laser producing a plurality of laser pulses in a laser beam, an optical attenuator disposed in the laser beam to attenuate the individual pulse energy in the laser beam to provide an attenuated pulsed laser beam without substantial spatial distortion or angular deviation, pick-off means for sensing the energy in the attenuated laser beam and means coupled to the pick-off means for controlling the optical attenuator to vary the individual pulse energy in the attenuated laser beam to thereby vary the pulse output fluence from the apparatus, said optical attenuator being free of degradation after repeated pulses.

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