Method for fabricating a substrate having spaced apart microcapillaries thereon

• US 5,383,512 A
• Filed: 05/24/1993
• Issued: 01/24/1995
• Est. Priority Date: 01/27/1993
• Status: Expired due to Fees

• Current Assignee: Midwest Research Institute
• Original Assignee: Midwest Research Institute
• Inventors: Jarvis, Eric E.
• Primary Examiner(s): Fiorilla, Christopher A.
• Application Number:
  US08/065,777
• Time in Patent Office: 610 Days
• Field of Search: 264/81, 264/105, 264/309, 264/316, 264/317, 249/117, 249/140, 204/192.1, 204/192.12, 204/192.14, 164/46
• US Class Current: 164/46
• CPC Class Codes: C23C 14/0005 Separation of the coating from the substrate
• CPC Class Codes: C23C 14/046 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 14/20 on organic substrates
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: C23C 16/045 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Abstract

Methods for manufacturing a self-supporting substrate having a plurality of spaced-apart needles (spikes or microcapillaries) projecting upwardly from a major surface of the substrate. In a preferred method, metal is deposited onto a porous membrane such that the metal extends into the pores, after which the membrane is dissolved.

Claims

1. A method for manufacturing a self-supporting substrate having a plurality of spaced needles projecting outwardly from a major surface of said substrate, the method comprising the steps of:

(a) providing a porous polycarbonate membrane having a plurality of pores extending therethrough wherein said pores have a diameter of about 0.1 to 5 microns; and

wherein said membrane has a thickness of about 5 to 10 microns;

(b) depositing a metal onto a major surface of said membrane in a manner such that a layer of the metal is formed on said major surface of said membrane, and wherein the metal extends into the pores to form said plurality of spaced needles wherein said membrane is disposed at an angle relative to the metal being deposited, and rotated such that said formed needles comprise nucricaoukkarues; and

(c) dissolving said membrane in solvent to leave a self-supporting metal substrate with said needles projecting outwardly therefrom.

2. A method in accordance with claim 1, wherein said metal is selected from the group consisting of aluminum, gold, tungsten, nickel, and silver.

3. A method in accordance with claim 1, wherein said metal is deposited on said membrane by means of chemical vapor deposition.

4. A method in accordance with claim 1, wherein said metal is deposited on said membrane by means of evaporation from a metal source.

5. A method in accordance with claim 1, wherein said metal is deposited on said membrane by means of sputtering.

6. A method for manufacturing a self-supporting substrate having a plurality of spaced needles projecting outwardly from a major surface of said substrate, the method comprising the steps of:

(a) providing a porous polycarbonate membrane having a plurality of pores extending therethrough wherein said pores have a diameter of about 0.1 to 5 microns; and

wherein said membrane has a thickness of about 5 to 10 microns;

(b) depositing a metal onto a major surface of said membrane in a manner such that a layer of the metal is formed on said major surface of said membrane, and wherein the metal extends into the pores to form said plurality of spaced needles, wherein said metal is deposited onto said surface of said membrane from a diffuse source such that said formed needles comprise microcapillaries; and

(c) dissolving said membrane in solvent to leave a self-supporting metal substrate with said needles projecting outwardly therefrom.