Process and apparatus for optical near field microlithography

• US 5,384,464 A
• Filed: 05/07/1992
• Issued: 01/24/1995
• Est. Priority Date: 09/22/1989
• Status: Expired due to Fees

• Current Assignee: SIM SA (Luxembourg) (Mylan N.V.)
• Original Assignee: SIM SA (Luxembourg) (Mylan N.V.)
• Inventors: Mantovani, James, Goudonnet, Jean-Pierre, De Fornel, Frederique
• Primary Examiner(s): Berman, Jack I.
• Application Number:
  US07/842,184
• Time in Patent Office: 992 Days
• Field of Search: 250/492.2, 250/491.1
• US Class Current: 250/492.2
• CPC Class Codes: G03F 7/70375 Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
• CPC Class Codes: H01J 37/304 Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Abstract

Direct scanning microlithography process of a substrate such as a wafer, by means of an optical and/or electronic beam, for obtaining photomechanical or electromechanical lithography of submicrometric structures at the surface of the substrate, wherein the source of the optical and/or electronic beam used for lithography is kept at an appropriate distance from the substrate by means of a waveguide proximity probe, such as a fiber optic proximity probe capable of measuring rapid variation, depending on the distance, of the intensity of an electromagnetic wave reflected by the substrate within the near field area located at the end of the probe. The invention also concerns microlithography devices using this process.

Claims

1. Direct scanning microlithography process on a wafer-shaped substrate having a surface by at least one of an optical beam and an electronic beam for achieving photomechanical or electromechanical lithography of submicrometric structures on the surface of the substrate, the process comprising:

holding a source of at least one of an optical beam and an electronic beam for lithography at a close distance to the substrate using a waveguide proximity probe comprising a fiber optic proximity probe having an end, with the source being aligned with the end of the waveguide;

aligning a point of impact of the at least one of an optical beam and an electronic beam with a point of impact of a coherent light wave which is injected into the waveguide, so that, in positioning the end above the surface of the substrate, a coupling coefficient between a propagation mode of the waveguide and a propagation mode of an electrical field of a light wave reflected by the surface and guided in return by the waveguide, is assimilated with a rapidly decreasing function that depends upon the distance.

2. The microlithography process according to claim 1, wherein the wafer-shaped substrate includes a photoresist resin thereon, and the wavelength of light used for photomechanical lithography of the photoresist resin is different from the wavelength of the coherent light used to keep the source of the light close to the surface to be exposed by the fiber optical proximity probe.

3. The microlithography process according to claim 2, wherein radiation with a wavelength suitable for exposure of the photoresist resin is injected into the fiber optic.

4. The microlithography process according to claim 1, wherein the microlithography of the substrate is carried out by electromechanical lithography of an electroresist resin previously deposited on this substrate, the electrons being emitted, for this purpose, by a conductor tip submitted to the action of an electric field applied between the substrate and the tip, which is integral with the fiber optic proximity probe.

5. Device for microlithography of a wafer-shaped substrate for producing submicrometric structures on a surface of the substrate, comprising:

a first source of at least one of an optical beam and an electronic beam for lithography;

a second source of light;

a near field proximity probe comprising a fiber optic adapted to be positioned at a distance from the surface of the substrate;

a transmission path connecting said first source and said second source to said field proximity probe;

means for vertical positioning of the near field proximity probe;

a feedback device associated with said means for vertical positioning for aligning a point of impact of the at least one of an optical beam and an electronic beam with a point of impact of a coherent light wave which is injected into the fiber optic by said second source, so that an end of the fiber optic is positionable above the surface of the substrate with a coupling coefficient between a propagation mode of the fiber optic and a propagation mode of an electrical field of a light wave reflected by the surface and guided in return by the fiber optic is assimilated with a rapidly decreasing function that depends upon a distance of said fiber optic from the surface.

6. The microlithography device in accordance with claim 5, wherein said transmission path comprises a first optic coupler and a second optic coupler, said fiber optic being connected to an outlet transmission path at an outlet of said first optic coupler, said first optic coupler having an input transmission path connected to an outlet transmission path of said second optic coupler, said second optic coupler being connected via a first input transmission path to said first source and via a second input transmission path to said second source to obtain a joint propagation of said first source and said second source in said fiber optic.

7. The microlithography device in accordance with claim 6, wherein said fiber optic comprises a fluorescent fiber able to generate a radiation of the wavelength of X-rays.

8. The microlithography device according to claim 5, wherein the end of the fiber optic of the proximity probe is partially covered with a layer of metal forming an electron emitter when submitted by suitable polarization means to a difference of potential causing an emission of electrons at said end, the electrons being capable of being transmitted in a direction of a substrate to be engraved having a photoresist resin deposited on a surface.

9. The microlithography device according to claim 8, wherein said layer of metal comprises a thickness so as to be transparent to light propagated in the fiber optic of the proximity probe.

10. The microlithography device according to claim 8, wherein the fiber optic is a fluorescent fiber capable of generating a short wavelength radiation in order to expose the resin.