Method of fabricating semiconductor thin film and a Hall-effect device

• US 5,385,864 A
• Filed: 05/23/1994
• Issued: 01/31/1995
• Est. Priority Date: 05/28/1993
• Status: Expired due to Term

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Kitabatake, Kawasaki, Tetuo, Hirao, Takasi, Koretika, Tetuhiro
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): Paladugu, Ramamohan Rao
• Application Number:
  US08/247,655
• Time in Patent Office: 253 Days
• Field of Search: 437/126, 437/129, 437/132, 437/133, 437/184
• US Class Current: 438/48
• CPC Class Codes: H01L 21/02381 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02466 Antimonides
• CPC Class Codes: H01L 21/02502 consisting of two layers
• CPC Class Codes: H01L 21/02549 Antimonides
• CPC Class Codes: H01L 21/02631 Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
• CPC Class Codes: H10N 50/10 Magnetoresistive devices
• CPC Class Codes: H10N 52/01 Manufacture or treatment
• CPC Class Codes: H10N 52/101 Semiconductor Hall-effect devices
• CPC Class Codes: Y10S 438/974 Substrate surface preparation

Abstract

A method of fabricating a semiconductor thin film is initiated with preparing a substrate having a surface consisting of a single crystal of Si. The surface has an oxide film. Then, the oxide film is removed. The dangling bonds of the Si atoms on the surface are terminated with hydrogen atoms. An initial layer is formed on the substrate of the single crystal of Si terminated with the hydrogen atoms, of at least one selected from the group consisting of Al, Ga, and In. A buffer layer containing at least In and Sb is formed on the initial layer. A semiconductor thin film containing at least In and Sb is formed on the buffer layer at a temperature higher than the temperature at which the buffer layer is started to be formed. There is also disclosed a method of fabricating a Hall-effect device. This method is initiated with forming a semiconductor thin film by making use of the above-described fabrication method. Then, electrodes are attached to the thin film.

Claims

1. A method of fabricating a semiconductor thin film, comprising the steps of:

preparing a substrate having a surface consisting of a single crystal of Si;

removing an oxide film from the surface of the substrate and terminating dangling bonds of Si atoms on the surface with hydrogen atoms;

forming an initial layer of at least one selected from the group consisting of Al, Ga, and In on the substrate terminated with the hydrogen atoms;

forming a buffer layer containing at least In and Sb on the initial layer; and

forming a semiconductor thin film containing at least In and Sb on said buffer layer at a temperature higher than a temperature at which said buffer layer is started to be formed.

2. The method in accordance with claim 1, wherein

(A) said initial layer is formed of Al to a thickness of 0.1 to 3 nm;

(B) said buffer layer is started to be formed at a temperature of 250°

-430°

C.; and

(C) said semiconductor thin film is formed at a temperature of 370°

-460°

C. higher than said temperature at which said buffer layer is started to be formed.

3. The method in accordance with claim 1, wherein

(A) said initial layer is formed of Ga to a thickness of 0.1 to 2 nm;

(B) said buffer layer is started to be formed at a temperature of 250°

-400°

C.; and

(C) said semiconductor thin film is formed at a temperature of 370°

460°

C. higher than said temperature at which said buffer layer is started to be formed.

4. The method in accordance with claim 1, wherein

(A) said initial layer is formed out of In to a thickness of 0.1 to 2 nm;

(B) said buffer layer is started to be formed at a temperature of 250°

-350°

C.; and

(C) said semiconductor thin film is formed at a temperature of 370°

-460°

C.

5. The method in accordance with claim 1, wherein

said buffer layer consists of In and Sb.

6. The method in accordance with claim 1, wherein

said buffer layer consists of Al, In, and Sb, and wherein said Al has a proportion decreasing with increasing thickness of said buffer layer.

7. The method in accordance with claim 1, wherein

said buffer layer consists of Ga, In, and Sb.

8. The method in accordance with claim 1, wherein

a proportion of Al, In, and Sb of the buffer layer varies continuously or in a stepwise fashion from an interface with said initial layer to an interface with said semiconductor thin film, from a proportion of those of the initial layer to a proportion of those of the semiconductor thin film.

9. The method in accordance with claim 1, wherein

said buffer layer is formed while maintaining said temperature at which said buffer layer is started to be formed.

10. The method in accordance with claim 7, wherein

said buffer layer is formed in such a way that a ratio of a number of evaporated Sb particles to a number of evaporated In particles is increased with increasing thickness of said buffer layer and then temperature of said substrate is elevated at least to 370°

C. at a rate exceeding 0.5°

C./sec.

11. The method in accordance with claim 1, wherein

said buffer layer is formed in such a way that temperature of said substrate is elevated with increasing thickness of said buffer layer.

12. The method in accordance with claim 1, wherein

said buffer layer is formed in such a way that temperature of said substrate is descended with increasing thickness of the buffer layer, and then the substrate is elevated at least to 370°

C. at a rate exceeding 0.5°

C./sec.

13. The method in accordance with claim 1, wherein

said semiconductor thin film consists only of indium antimonide or consists of a mixed crystal between indium antimonide and at least one selected from the group consisting of indium phosphide, indium arsenide, indium bismuthide, and Ga antimonide.

14. A method for fabricating a Hall-effect device, comprising the steps of:

forming a semiconductor thin film by making use of the method of claim 1; and

attaching electrodes to said semiconductor thin film.