Acceleration sensor with direct mounting

• US 5,388,459 A
• Filed: 12/28/1992
• Issued: 02/14/1995
• Est. Priority Date: 12/27/1991
• Status: Expired due to Term

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Inoue, Jiro, Yamashita, Muneharu, Tabota, Jun, Mizuno, Toshihiro
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US07/997,675
• Time in Patent Office: 778 Days
• Field of Search: 73/517 AV, 73/517 R, 73/493, 73/516 R, 73/431, 180/282, 307/121, 307/105 B, 310/315, 310/319, 310/329
• US Class Current: 73/514.34
• CPC Class Codes: G01P 15/0915 of the shear mode type

Abstract

As acceleration sensor has an insulating substrate, a pair of signal deriving electrodes provided on one surface and an acceleration detecting element electrically connected to the pair of electrodes. The acceleration detecting element is provided with first and second piezoelectric elements, having a pair of facing end surfaces, which are directly or indirectly coupled to each other to be polarized in reverse directions. First end surfaces of the first and second piezoelectric elements are electrically connected to the pair of signal deriving electrodes respectively while other end surfaces, being opposite to the first end surfaces, of the first and second piezoelectric elements are electrically connected with each other.

Claims

1. An acceleration sensor comprising:

an insulating substrate having a pair of signal deriving electrodes formed directly on an upper surface thereof; and

an acceleration detecting element fixed to and electrically connected to said pair of signal deriving electrodes so as to secure said acceleration detecting element, via said electrodes, to said insulating substrate,

said acceleration detecting element including first and second piezoelectric elements each having a pair of facing end surfaces and being coupled with each other, said first and second piezoelectric elements being polarized in reverse directions,

wherein first end surfaces of each of said first and second piezoelectric elements are electrically connected to said pair of signal deriving electrodes respectively, and opposite end surfaces of each of said first and second piezoelectric elements are electrically connected to each other.

2. An acceleration sensor of claim 1, wherein said first and second piezoelectric elements are polarized in directions parallel to said upper surface of said insulating substrate.

3. An acceleration sensor of claim 1, wherein said first and second piezoelectric elements are polarized in directions orthogonal to said insulating substrate.

4. An acceleration sensor of claim 1, wherein said electrically connected opposite end surfaces of each of said first and second piezoelectric elements are directly bonded to each other.

5. An acceleration sensor of claim 1, further comprising a coupling member for coupling said opposite end surfaces of each of said first and second piezoelectric elements with each other.

6. An acceleration sensor of claim 5, wherein said coupling member comprises conductive surfaces being coupled to said first and second piezoelectric elements.

7. An acceleration sensor of claim 6, wherein said coupling member is made of a metal.

8. An acceleration sensor of claim 5, wherein lower surfaces, being said first end surfaces of said first and second piezoelectric elements are bonded to said pair of signal deriving electrodes respectively,

said coupling member being bonded to upper surfaces, being said opposite surfaces, of each of said first and second piezoelectric elements over said first and second piezoelectric elements.

9. An acceleration sensor of claim 5, wherein said coupling member is formed by a mass applying member applying a specified degree of mass to said first and second piezoelectric elements.

10. An acceleration sensor of claim 1, wherein said acceleration detecting element further comprises first and second conductive support members bonded to said first end surfaces of each of said first and second piezoelectric elements respectively,

said first and second conductive support members being electrically connected to said pair of signal deriving electrodes respectively.

11. An acceleration sensor of claim 1, wherein said insulating substrate is a part of a hybrid IC substrate.

12. An acceleration sensor of claim 1, wherein a shielding case is fixed to said insulating substrate from said upper surface thereof to cover at least said acceleration detecting element fixed on said upper surface of said insulating substrate.

13. An acceleration sensor of claim 1, wherein said first and second piezoelectric elements are arranged along directions different from an acceleration acting direction and bonded to each other,

said first and second piezoelectric elements being polarized in directions along said acceleration acting direction.

14. An acceleration sensor of claim 13, further comprising a coupling member arranged between said first and second piezoelectric elements, said first end surfaces of each of said first and second piezoelectric elements being connected to each other through said coupling member.

15. An acceleration sensor of claim 14, wherein said coupling member is a mass applying member having conductivity.

16. An acceleration sensor of claim 15, wherein said first and second piezoelectric elements and said coupling member form a vibration space in the form of a longitudinal notch for said acceleration detecting element.

17. An acceleration sensor of claim 13, wherein said first and second piezoelectric elements are arranged along directions orthogonal to said acceleration acting direction and connected to each other.