Method and apparatus for near-field, scanning, optical microscopy by reflective, optical feedback

• US 5,389,779 A
• Filed: 07/29/1993
• Issued: 02/14/1995
• Est. Priority Date: 07/29/1993
• Status: Expired due to Term

• Current Assignee: American Telephone & Telegraph Company (AT&T, Inc.)
• Original Assignee: AT&T Corporation (AT&T, Inc.)
• Inventors: Betzig, Robert E., Grubb, Stephen G., Miller, David A. B., Brener, Igal M.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): LE, QUE TAN
• Application Number:
  US08/099,681
• Time in Patent Office: 565 Days
• Field of Search: 250/216, 250/27.26, 250/234, 250/306, 250/307, 250/309, 250/563, 356/121, 356/5, 356/152, 356/4, 356/124
• US Class Current: 250/216
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G11B 11/10541 for reproducing
• CPC Class Codes: G11B 7/12 Heads, e.g. forming of the optical beam spot or modulation of the optical beam disposition or mounting of head elements within housing or with provision for moving of light source, optical beam or detector, irrelevant to the transducing method G11B7/08 ; modulating lasers H01S3/10; controlling the intensity, colour, phase, polarisation or direction of light beams arriving from an independent light source, e.g. switching gating or modulating G02F1/00
• CPC Class Codes: G11B 7/1384 Fibre optics

Abstract

Apparatus and methods of near-field scanning optical microscopy (NSOM) are described. A sensing technique is used, in which a light source having an optical cavity is reflectively coupled to the sample surface. Changes in the surface properties of the sample at the sensed location alter the optical feedback in the light source. This leads to detectable changes in the output characteristics of the light source.

Claims

1. Apparatus for collecting information from a surface of a sample, comprising:

a) a light source that comprises a first optical cavity, and that further comprises an emissive face portion for emitting therethrough radiation from the first optical cavity;

b) means for situating the emissive face portion near the sample surface such that the optical cavity is reflectively coupled to a spot on the sample surface, relative to at least one wavelength λ

of radiation emitted from the optical cavity;

c) means for scanning the spot over a portion of the sample surface; and

d) means for detecting changes in an output characteristic of the light source,

CHARACTERIZED IN THAT;

e) the emissive face portion has a maximum extent L in at least one dimension parallel to the sample surface that is less than λ

; and

f) the situating means, in use, to situate the emissive face portion at a distance from the sample surface that is less than or approximately equal to L.

2. Apparatus of claim 1, wherein:

a) the light source comprises a glass waveguiding body; and

b) at least a portion of said body is doped with a fluorescent species such that said doped portion can emit radiation when appropriately stimulated by pump radiation.

3. Apparatus of claim 2, wherein:

a) the glass waveguiding body is an optical fiber having a tapered terminal portion and an end thereof; and

b) the emissive face portion is defined in the end of the tapered terminal portion.

4. Apparatus of claim 1, wherein the light source comprises a laser, the optical cavity is internal to the laser, and at least a portion of the cavity comprises a gain region of the laser.

5. Apparatus of claim 1, wherein:

the light source comprises a laser having a second optical cavity internal thereto;

the first optical cavity is external to the laser; and

the first optical cavity is optically coupled to the second optical cavity.

6. Apparatus of claim 5, wherein:

the light source comprises an optical fiber optically coupled to the laser and having a tapered end portion distal the laser;

the emissive face portion is defined in the tapered end portion; and

the first optical cavity is defined within the optical fiber.

7. Apparatus of claim 1, wherein:

the light source comprises an optical amplifier having a second optical cavity internal thereto;

the first optical cavity is external to the optical amplifier; and

the first optical cavity is optically coupled to the second optical cavity.

8. Apparatus of claim 7, wherein:

the light source comprises an optical fiber optically coupled to the optical amplifier and having a tapered end portion distal the optical amplifier;

the emissive face portion is defined in the tapered end portion; and

the first optical cavity is defined within the optical fiber.

9. Apparatus of claim 1, wherein the light source comprises a fluorescent body situated within the first optical cavity.

10. Apparatus of claim 9, wherein the first optical cavity has a length of approximately ##EQU2##

11. Apparatus of claim 1, wherein:

the light source comprises a laser and means for modelocking the laser at a variable modelocking frequency f_ml ; and

the detecting means comprise means for detecting changes in f_ml.

12. Apparatus of claim 1, wherein:

the light source comprises a laser capable of emitting radiation at the wavelength λ and

frequency ##EQU3## where c is the vacuum velocity of light; and

the detection means comprises means for detecting changes in ν

.

13. Apparatus of claim 1, wherein the detecting means comprise means for detecting changes in the intensity of radiation emitted from the light source.

14. A method for collecting information from a surface of a sample, comprising:

a) operating a light source having an optical cavity such that electromagnetic radiation is present in the optical cavity, and a portion of the radiation in the optical cavity is emitted through an emissive face portion;

b) during (a), situating the emissive face portion near the sample surface such that the optical cavity is reflectively coupled to a spot on the sample surface, relative to at least one wavelength λ

of radiation emitted by the light source;

c) during (b), scanning the spot over a portion of the sample surface; and

d) during (c), detecting changes in an output characteristic of the light source.

CHARACTERIZED IN THAT step (b) is carried out such that;

e) the spot has a maximum extent L in at least one dimension parallel to the sample surface that is less than λ

; and

`f) the emissive face portion is situated at a distance from the sample surface that is less than or approximately equal to L.

15. The method of claim 14, wherein:

the light source is capable of emitting radiation at a frequency ##EQU4## where c is the vacuum velocity of light; and

(d) comprises detecting changes in ν

.

16. The method of claim 14, wherein:

the light source comprises a laser;

(a) comprises modelocking the laser such that pulses of radiation are emitted at a modelocking frequency f_ml ; and

(d) comprises detecting changes in f_ml.

17. The method of claim 14, wherein:

the light source comprises a laser having a relaxation oscillation frequency f_rlx ;

the method further comprises, during (a), the step of modulating, at a modulation frequency, the intensity of radiation in the optical cavity; and

(d) comprises detecting an intensity of radiation emitted from the laser, and detecting changes in the AC component of said intensity at the modulation frequency.

18. The method of claim 17, wherein the modulating step comprises varying the separation between the sample surface and the emissive face portion.

19. The method of claim 17, wherein the light-source-operating step comprises pumping the laser at a pump power level, and the modulating step comprises modulating the pump power level.

20. The method of claim 17, 18, or 19, wherein the modulation frequency is approximately equal to f_rlx.

21. The method of claim 14, wherein:

the light source comprises a laser having a relaxation oscillation frequency f_rlx ;

the method further comprises providing a sample having a pattern impressed on a surface thereof, said pattern having spatially periodic reflectivity variations;

step (c) comprises scanning the spot over the pattern such that said reflectivity variations modulate radiation in the optical cavity at a modulation frequency; and

step (c) is carried out at a scan rate selected, relative to the periodicity of said reflectivity variations, such that the modulation frequency is approximately equal to f_rlx.

22. The method of claim 14, wherein the detecting step comprises detecting changes in the intensity of radiation emitted from the light source.