×

Vacuum processing apparatus

  • US 5,391,260 A
  • Filed: 03/26/1993
  • Issued: 02/21/1995
  • Est. Priority Date: 03/27/1992
  • Status: Expired due to Term
First Claim
Patent Images

1. A vacuum processing apparatus comprising:

  • a vacuum processing chamber having a gas inlet and a gas outlet for processing a sample located therein by using a processing gas introduced through said gas inlet; and

    an exhaust pump having a suction port coupled to said gas outlet of said vacuum processing chamber for exhausting said processing gas introduced into said vacuum processing chamber, a cross-sectional area of said suction port of said exhaust pump being not larger than a cross-sectional area of said gas outlet of said vacuum processing chamber.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×