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Micromachined accelerometer gyroscope

  • US 5,392,650 A
  • Filed: 04/22/1993
  • Issued: 02/28/1995
  • Est. Priority Date: 01/11/1991
  • Status: Expired due to Term
First Claim
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1. A combined angular rate and acceleration sensor comprising a structure formed from a substantially planar, monolithic body of electrically conductive material having first and second major surfaces, said structure having an outer frame portion disposed around first and second inner frame portions, each of said inner frame portions being disposed around an associated proof mass and connected thereto through a plurality of flexures, said structure further comprising a driver mass portion that is interposed between said first and second inner frame portions, said driver mass portion being connected to said first and said second inner frame portions through a plurality of primary flexures, said plurality of primary flexures and said first and said second inner frame portions being connected to said outer frame portion through a plurality of suspensory flexures.

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