×

Capacitance type accelerometer

  • US 5,392,651 A
  • Filed: 12/06/1993
  • Issued: 02/28/1995
  • Est. Priority Date: 11/15/1988
  • Status: Expired due to Fees
First Claim
Patent Images

1. A capacitance type accelerometer, having;

  • a first silicon plate formed so as to provide a movable electrode part which is moved according to acceleration;

    two second silicon plates which are disposed on both sides of the first silicon plate with certain separation distances; and

    thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode part and the two second silicon plates so as to respectively provide predetermined gaps between the movable electrode and the second silicon plates, and stick the first silicon plate except the movable electrode part and the two second silicon plates together through said thermal oxide films by heat processing of the silicon plates.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×