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Method of manufacturing miniaturized components of chemical and biological detection sensors that employ ion-selective membranes, and supports for such components

  • US 5,393,401 A
  • Filed: 01/07/1993
  • Issued: 02/28/1995
  • Est. Priority Date: 05/10/1991
  • Status: Expired due to Fees
First Claim
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1. In a method of manufacturing supports for miniaturized components of sensors that detect chemicals and biologicals by means of ion-selective membranes, said method comprising the following steps:

  • (a) producing a thin substrate of a single-crystal silicon having a front side and a back side and having one of a (100) and a (110)-orientation in its plane,(b) etching said substrate anisotropically from the front side to the back side, thereby forming an opening that tapers from the front side to the back side in the form of a truncated pyramid, when etched in a silicon substrate having a (100)-orientation, and an opening with two parallel as well as perpendicular walls and two sloping walls when etched in a silicon substrate having a (110)-orientation, said opening forming a containment;

    the improvement wherein(1) at least one electrode is applied against one of the internal walls of the opening;

    (2) a liquid solution is introduced into the containment from the front side, said solution comprising one of a polymer in a solvent which is allowed to evaporate and a solution which is allowed to solidify into an hydrogel; and

    (3) leaving the solidified polymer or hydrogel as ion-selective membrane within the containment and with contact with the electrode.

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