Method of manufacturing miniaturized components of chemical and biological detection sensors that employ ion-selective membranes, and supports for such components
First Claim
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1. In a method of manufacturing supports for miniaturized components of sensors that detect chemicals and biologicals by means of ion-selective membranes, said method comprising the following steps:
- (a) producing a thin substrate of a single-crystal silicon having a front side and a back side and having one of a (100) and a (110)-orientation in its plane,(b) etching said substrate anisotropically from the front side to the back side, thereby forming an opening that tapers from the front side to the back side in the form of a truncated pyramid, when etched in a silicon substrate having a (100)-orientation, and an opening with two parallel as well as perpendicular walls and two sloping walls when etched in a silicon substrate having a (110)-orientation, said opening forming a containment;
the improvement wherein(1) at least one electrode is applied against one of the internal walls of the opening;
(2) a liquid solution is introduced into the containment from the front side, said solution comprising one of a polymer in a solvent which is allowed to evaporate and a solution which is allowed to solidify into an hydrogel; and
(3) leaving the solidified polymer or hydrogel as ion-selective membrane within the containment and with contact with the electrode.
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Abstract
The invention relates to a process for producing miniaturized chemical and biological sensor elements with ion-selective membranes. To simplify production in the micro range, an aperture (5,6) starting from the front (3) and tapering toward the back (4) is made in a thin silicon substrate (1) so that the front and back are interconnected. A liquid with which the ion-selective membrane is formed is poured into the containment (2) thus formed. Vertical ISFETs may also be made on the above principle.
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Citations
33 Claims
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1. In a method of manufacturing supports for miniaturized components of sensors that detect chemicals and biologicals by means of ion-selective membranes, said method comprising the following steps:
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(a) producing a thin substrate of a single-crystal silicon having a front side and a back side and having one of a (100) and a (110)-orientation in its plane, (b) etching said substrate anisotropically from the front side to the back side, thereby forming an opening that tapers from the front side to the back side in the form of a truncated pyramid, when etched in a silicon substrate having a (100)-orientation, and an opening with two parallel as well as perpendicular walls and two sloping walls when etched in a silicon substrate having a (110)-orientation, said opening forming a containment;
the improvement wherein(1) at least one electrode is applied against one of the internal walls of the opening; (2) a liquid solution is introduced into the containment from the front side, said solution comprising one of a polymer in a solvent which is allowed to evaporate and a solution which is allowed to solidify into an hydrogel; and (3) leaving the solidified polymer or hydrogel as ion-selective membrane within the containment and with contact with the electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A method of manufacturing a vertical ISFET on a thin silicon substrate having a front side and a back side comprising the steps of (1) providing the front side of the silicon substrate with superimposed positive and negative layers constituting a source, drain and gate;
- (2) producing in the substrate an opening that tapers from the front side to the back side and provides communication and containment therebetween, and (3) introducing a-liquid into the containment opening to form an ion-selective membrane, wherein the containment is anisotropically etched, sloping together through the layers, and accommodates the ion-selective membrane, and wherein walls of the containment are provided with a dielectric layer.
- View Dependent Claims (29, 30, 31, 32, 33)
Specification