Ion beam assisted method of producing a diamond like carbon coating

• US 5,393,572 A
• Filed: 07/11/1994
• Issued: 02/28/1995
• Est. Priority Date: 07/11/1994
• Status: Expired due to Term

• Current Assignee: Southwest Research Institute
• Original Assignee: Southwest Research Institute
• Inventors: Dearnaley, Geoffrey
• Primary Examiner(s): King, Roy V.
• Application Number:
  US08/273,492
• Time in Patent Office: 232 Days
• Field of Search: 427/523, 427/577, 427/249, 427/122, 423/446, 156/DIG. 68
• US Class Current: 427/523
• CPC Class Codes: C23C 14/0605 Carbon
• CPC Class Codes: C23C 14/22 characterised by the process of coating
• CPC Class Codes: Y10S 427/102 Fullerene type base or coating

Abstract

The present invention relates to an ion beam assisted method of producing a diamond like carbon (DLC) coating on the surface of a material. More particular, the invention relates to an ion beam assisted method using a fullerene precursor to produce a DLC coating, wherein the chemical composition of the ion beam and precursor are selectively chosen to determine the physical properties of the DLC coating.

Claims

1. An ion beam assisted method of producing a diamond-like carbon (DLC) coating comprising the steps of:

(a) directing a vaporized stream of fullerene precursor toward a surface to be coated; and

(b) bombarding the surface to be coated and the fullerene precursor with an ion beam having energies of at least 5 KeV for a sufficient amount of time to rupture a sufficient number of carbon-to-carbon bonds in the precursor to produce an amorphous film comprising randomly disposed carbon atoms in bonded networks.

2. The method of claim 1, wherein the vaporized stream of fullerene precursor is produced by thermal sublimation.

3. The method of claim 1, wherein the ion beam comprises nitrogen atoms.

4. The method of claim 1, wherein the ion beam comprises argon atoms.

5. The method of claim 1, wherein the ion beam comprises fluorine.

6. The method of claim 1, wherein said ion beam comprises boron atoms.

7. The method of claim 1, wherein said ion beam comprises sulfur atoms.

8. The method of claim 1, wherein said ion beam comprises atoms of a metallic species.

9. The method of claim 1, wherein said ion beams have energies in the range of 5-50 KeV.

10. The method of claim 1, wherein said fullerene precursor comprises fullerene molecules comprising noncarbonaceous side chains.

11. The method of claim 10, wherein said noncarbonaceous side chains comprise amino groups.

12. The method of claim 10, wherein said noncarbonaceous side chains comprise either silane or siloxane.

13. The method of claim 10, wherein said noncarbonaceous side chains comprise metal atoms.

14. An ion beam assisted method of producing a diamond-like carbon (DLC) coating comprising the steps of:

(a) directing a vaporized stream of fullerene precursor toward a surface to be coated;

(b) bombarding the surface to be coated and the fullerene precursor with a first ion beam having energies of at least 5 KeV for a sufficient amount of time to rupture a sufficient number of carbon-to-carbon bonds in the precursor to produce an amorphous film comprising randomly disposed carbon atoms in bonded networks;

(c) subsequently directing a vaporized stream of hydrocarbon precursor toward the coated surface; and

(d) bombarding coated surface and the hydrocarbon precursor with a second ion beam having energies of at least 5 KeV for a sufficient amount of time to rupture a sufficient number of carbon-to-hydrogen bonds in the precursor to produce a carbonaceous residue above the prior layer of said amorphous film.

15. The method of claim 14, wherein the hydrocarbon precursor is polyphenyl ether.

16. The method of claim 14, wherein the first and second ion beams comprise the same species of ions.

17. The method of claim 14, wherein said ion beams comprise fluorine.

18. The method of claim 17, wherein said ion beams comprise either BF₃ or BF₂.

19. The method of claim 14, wherein said ion beams comprise nitrogen.

20. An ion beam assisted method of producing a diamond-like carbon (DLC) coating having desired physical properties, comprising the steps of:

(a) directing a vaporized stream of fullerene precursor toward a surface to be coated, said fullerene precursor comprising fullerene molecules having noncarbonaceous side chains, said side chains being chosen to affect the physical properties consisting of hardness, coefficient of friction, catalytic activity or mechanical properties of the DLC coating; and

(b) bombarding a surface to be coated and the fullerene precursor with an ion beams having energies in the range of 5-50 KeV for a sufficient amount of time to rupture a sufficient number of carbon-to-carbon bonds in the precursor to produce an amorphous film comprising randomly disposed carbon atoms in bonded networks, said precursor comprising atomic species selectively chosen to affect the physical properties of the DLC coating.