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Ion beam assisted method of producing a diamond like carbon coating

  • US 5,393,572 A
  • Filed: 07/11/1994
  • Issued: 02/28/1995
  • Est. Priority Date: 07/11/1994
  • Status: Expired due to Term
First Claim
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1. An ion beam assisted method of producing a diamond-like carbon (DLC) coating comprising the steps of:

  • (a) directing a vaporized stream of fullerene precursor toward a surface to be coated; and

    (b) bombarding the surface to be coated and the fullerene precursor with an ion beam having energies of at least 5 KeV for a sufficient amount of time to rupture a sufficient number of carbon-to-carbon bonds in the precursor to produce an amorphous film comprising randomly disposed carbon atoms in bonded networks.

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