Spinal sensor with integrated optics to detect chemical substances

• US 5,394,239 A
• Filed: 07/29/1993
• Issued: 02/28/1995
• Est. Priority Date: 08/10/1992
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Valette, Serge
• Primary Examiner(s): Turner, Samuel A.
• Application Number:
  US08/099,221
• Time in Patent Office: 579 Days
• Field of Search: 356/345, 356/361, 356/128, 356/133, 385/12, 385/14, 250/227.27, 250/227.19
• US Class Current: 356/481
• CPC Class Codes: G01N 2021/432 comprising optical fibres
• CPC Class Codes: G01N 2021/8578 Gaseous flow
• CPC Class Codes: G01N 21/552 Attenuated total reflection
• CPC Class Codes: G01N 21/85 Investigating moving fluids or granular solids
• CPC Class Codes: G02B 2006/12038 Glass (SiO2 based materials)
• CPC Class Codes: G02B 2006/2865 couplers of the 3x3 type
• CPC Class Codes: G02B 6/132 by deposition of thin films

Abstract

The invention concerns a sensor with integrated optics, to detect chemical substances, including a double spiral interlaced with wave guides and integrated on a substrate (13) receiving the signal of a light source (14) through a first optical component (15) able to separate into two portions the light intensity emitted by the source and sending output signals onto at least one detector (17) through a second optical component (16), the first of the two guides (11) being a reference guide isolated from the influence of the substance to be measured, and the second (12) being a measuring guide affected by the substance to be measured.

Claims

1. Sensor with integrated optics to detect chemical substances, which includes a double spiral interlaced with two wave guides and integrated on a substrate wherein a first of the two wave guides is a reference guide isolated from the influence of the substance to be measured, a second wave guide being a measuring guide affected by the substance to be measured, said sensor receives a signal from a light source through a first optical component enabling the light intensity emitted by the source to be separated into two portions and sends outgoing signals onto at least one detector through a second optical component.

2. Sensor according to claim 1, wherein the spiral comprises inlets and outlets, and wherein the inlets and outlets of the spiral are situated on the same side of the substrate.

3. Sensor according to claim 1, wherein the second wave guide is affected by the substance to be measured either directly or by means of a relay material.

4. Sensor according to claim 1, which detects luminous intensities at the outlets of the two guides.

5. Sensor according to claim 1, which measures phase variations produced between the first wave guide and the second wave guide.

6. Sensor according to claim 5, wherein the second optical component is a bicoupler.

7. Sensor according to claim 1, wherein the second optical component is able to connect the two wave guides and two detectors for detecting the luminous intensities at the outlet of said guides.

8. Sensor according to claim 1, wherein in the inlet and outlet portions of the double spiral, the two wave guides have a structure identical to that of the first wave guide.

9. Sensor according to claim 8, wherein outside the inlet and outlet portions of the spiral, the second wave guide has a central measuring portion which has a different structure allowing for measurement, the links between the inlet and outlet portions of the second wave guide and the central measuring portion being effected by an adiabatic transition.

10. Sensor according to claim 1, wherein the guides of the spiral are crossed by one of the two extremities of said guides, the crossing being embodied via the direct crossing of the guides within a plane of the spiral itself, with crossing angles of said guides preferably being greater than 10 degrees.

11. Sensor according to claim 1, wherein the crossing of spires of the spiral by one of the two extremities of the two guides of the spiral is embodied in the form of one upper (or lower) passage in the manner of a bridge by superimposing two crossed guiding structures, the lower structure constituted by the spiral itself being coupled optically to the upper crossing structure by means of two couplers situated on the incoming (or outgoing) extremity respectively on both sides of the wave guides of the spiral.

12. Sensor according to claim 5, wherein the second optical component is a tricoupler able to interfere with the outgoing signals of the guides so as to measure the phase variations induced between the first wave guide and the second wave guide.

13. Sensor according to claim 12, wherein the second optical component includes a central guide associated with the reference and measuring guides and disposed between the guides.

14. Sensor according to any one of the preceding claims, wherein the luminous wave guides are embodied in one of the Si/SiO₂ /Si₃ N₄ /SiO₂ (OIS1) and Si/SiO₂ /SiO₂ high index/SiO₂ (OIS2) structures.