Method of bonding tungsten titanium sputter targets to titanium plates and target assemblies produced thereby

• US 5,397,050 A
• Filed: 10/27/1993
• Issued: 03/14/1995
• Est. Priority Date: 10/27/1993
• Status: Expired due to Term

• Current Assignee: Tosoh SMD, Inc. (Tosoh Corporation)
• Original Assignee: Tosoh SMD, Inc. (Tosoh Corporation)
• Inventors: Mueller, John J.
• Primary Examiner(s): Heinrich, Samuel M.
• Application Number:
  US08/144,206
• Time in Patent Office: 503 Days
• Field of Search: 228/265, 228/155, 228/175, 228/193, 228/235.1, 228/262.71, 419/8
• US Class Current: 228/193
• CPC Class Codes: B22F 3/1216 Container composition
• CPC Class Codes: B22F 3/16 in successive or repeated steps
• CPC Class Codes: C22C 14/00 Alloys based on titanium
• CPC Class Codes: C23C 14/3407 Cathode assembly for sputtering apparatus, e.g. Target

Abstract

A method of producing a sputter target assembly including a tungsten-titanium target attached to a titanium backing plate. The method includes consolidating a tungsten-titanium powder composition to form a target while simultaneously bonding the powder composition to the titanium backing plate to form an interdiffusion-type bond between the target and the backing plate such that the target assembly possesses extremely high temperature operating capability.

Claims

1. A method of forming a sputter target assembly comprising the steps of:

(a) providing a backing plate;

(b) providing a powder composition;

(c) simultaneously pressure consolidating said powder composition to form a target portion and forming a bond between said backing plate and said target portion, said step (c) being performed in a hot isostatic press process wherein said backing plate and said powder composition are contained within a can subjected to a predetermined pressure and temperature to form a can assembly, said method further including the steps of heating said can assembly to a temperature no greater than said predetermined temperature and .pressing said can assembly in a platen press subsequent to step (c).

2. The method as in claim 1, wherein said backing plate comprises titanium and said powder composition comprises tungsten and titanium powders.

3. The method as in claim 2, wherein an interdiffusion-type bond is formed between said backing plate and said titanium in said powder composition during step (c).

4. The method as in claim 1, including the step of machining said can assembly subsequent to said step of pressing said can assembly in a platen press.

5. The method as in claim 1, further including the step of compacting said powder composition on said backing plate prior to step (c).

6. The method as in claim 1, including the step of causing said plate to undergo a reduction in diameter whereby surface straining occurs to strengthen the bond between said backing plate and said target portion.

7. The method as in claim 1, wherein the thermal expansion rate for said backing plate is closely matched to the thermal expansion rate for said target portion.

8. A method of forming a tungsten-titanium sputter target assembly comprising the steps of:

(a) placing a titanium plate within a can;

(b) placing powders of titanium and tungsten on said plate; and

(c) subjecting said can to a predetermined pressure and temperature whereby said powders of titanium and tungsten are compacted to form a target portion and are bonded to said plate, said step (c) being performed in a hot isostatic press process, evacuating said can prior to said step (c), and pressing said titanium and tungsten powders prior to said step (c) in a ram-type press until said powders are at least 50 percent dense.

9. The method as in claim 8, wherein step (c) forms a can assembly and including the step of heating said can assembly to a temperature no greater than said predetermined temperature and pressing said can assembly in a platen press to flatten said can assembly.

10. The method as in claim 9, including the step of machining said can assembly to predetermined final dimensions for said target assembly subsequent to said step of pressing said can assembly in a platen press.