Light transmissive, electrically-conductive, oxide film and methods of production

• US 5,397,920 A
• Filed: 03/24/1994
• Issued: 03/14/1995
• Est. Priority Date: 03/24/1994
• Status: Expired due to Fees

• Current Assignee: Minnesota Mining and Manufacturing Co (3M Company)
• Original Assignee: Minnesota Mining and Manufacturing Co (3M Company)
• Inventors: Tran, Nang T.
• Primary Examiner(s): Jackson, Jerome
• Assistant Examiner(s): Monin, Jr., Donald L.
• Application Number:
  US08/217,425
• Time in Patent Office: 355 Days
• Field of Search: 257/749, 257/448, 257/99, 257/449, 257/748, 257/102
• US Class Current: 257/749
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/1884 Manufacture of transparent electrodes, e.g. TCO, ITO
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

A light transmissive, electrically conductive oxide comprising tin and a Group II element is doped with a Group III element and with one or more of hydrogen or fluorine. The oxide may be deposited by sputtering at a temperature in the range from 25° to 350° C., or by chemical vapor deposition at temperatures in the range from 80° to 400° C.

Claims

1. A light transmissive, electrically-conductive oxide film comprising tin and a Group II element, said oxide film being doped with a Group III element and with a dopant selected from the group consisting of hydrogen, fluorine, and mixtures thereof.

2. The light transmissive, electrically-conductive oxide film of claim 1 wherein the Group III element is chosen from the group consisting of Al and B, or mixtures thereof.

3. A detector device comprising:

a) a film comprising energy-sensitive material which generates an electrical signal upon exposure to electromagnetic radiation;

b) a light transmissive, electrically-conductive layer in electrical contact with a side of said film; and

c) connecting means in electrical contact with said light transmissive, electrically-conductive layer for connecting the device to an external circuit;

wherein said light transmissive, electrically-conductive layer comprises an oxide comprising tin and a Group II element, said oxide being doped with a Group III element and with a dopant chosen from the group consisting of hydrogen, fluorine, and mixtures thereof.

4. The detector device of claim 3 wherein the energy-sensitive material is sensitive to visible light.

5. The detector device of claim 3 wherein the energy-sensitive material is sensitive to radiation energy.