Source and method for generating high-density plasma with inductive power coupling
First Claim
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1. A high density plasma source, comprising:
- a plasma formation chamber having inlets for injecting plasma gases;
a magnet disposed around said plasma formation chamber and operable to generate an axial magnetic field within said plasma formation chamber; and
a plurality of coil antenna sections disposed within said plasma formation chamber operable to generate a second magnetic field, such that a plasma is generated, said second magnetic field inductively coupled to said plasma and wherein said plurality of coil antenna sections are interconected such that said second magnetic field rotates relative to said axial magnetic field and said plasma formation chamber.
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Abstract
A source and method for generating high density plasma with inductive radio-frequency power coupling is provided in which coil antenna sections (34) within a plasma source (12) are used to generate a high-density uniform plasma. This plasma is then guided into transferred in a transfer chamber (14) and then to a processing chamber (16). Within the processing chamber (16), the plasma reacts with a semiconductor wafer (18) or another workpiece for plasma-enhanced deposition or etch processing.
146 Citations
18 Claims
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1. A high density plasma source, comprising:
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a plasma formation chamber having inlets for injecting plasma gases; a magnet disposed around said plasma formation chamber and operable to generate an axial magnetic field within said plasma formation chamber; and a plurality of coil antenna sections disposed within said plasma formation chamber operable to generate a second magnetic field, such that a plasma is generated, said second magnetic field inductively coupled to said plasma and wherein said plurality of coil antenna sections are interconected such that said second magnetic field rotates relative to said axial magnetic field and said plasma formation chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of generating a high-density plasma, comprising the steps of:
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injecting plasma gases into a plasma formation chamber; generating an axial magnetic field, the magnetic field having components within the plasma formation chamber; and generating a second magnetic field inductively coupled to the high-density plasma, the second magnetic field generated within the plasma formation chamber and wherein said second magnetic field rotates with respect to said axial magnetic field.
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16. A method of generating a high-density plasma, comprising the steps of:
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injecting plasma gases into a plasma formation chamber; generating an axial magnetic field, the magnetic field having components within the plasma formation chamber; and generating a second magnetic field inductively coupled to the high-density plasma, the second magnetic field generated within the plasma formation chamber wherein said second magnetic field rotates with respect to said axial magnetic field. - View Dependent Claims (17, 18)
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Specification