Isolated tungsten microelectromechanical structures
First Claim
Patent Images
1. A microstructure having electrically isolated, mechanically interconnected movable beams, comprising:
- a support including a cavity;
at least first and second released metal beams in said cavity and mounted to said support; and
dielectric isolator means mechanically joining and electrically insulating selected portions of said metal beams.
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Accused Products
Abstract
A process for fabricating mechanically interconnected, released, electrically isolated metal microstructures, and circuit components and actuators produced by the process. A dielectric stack on a substrate is patterned and etched to produce trenches in which a metal such as tungsten is deposited. The dielectric is removed from selected regions of the metal to expose metal beams, and to form mechanically interconnecting, electrically insulating hinges supporting the beams. The beams and hinges are then released for relative motion. Electrical potentials may be established between adjacent beams to produce controlled motion.
91 Citations
26 Claims
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1. A microstructure having electrically isolated, mechanically interconnected movable beams, comprising:
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a support including a cavity; at least first and second released metal beams in said cavity and mounted to said support; and dielectric isolator means mechanically joining and electrically insulating selected portions of said metal beams. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A microstructure having electrically isolated, mechanically interconnected movable metal beams, comprising:
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a support layer; a cavity formed in said layer, said layer forming walls surrounding said cavity; first and second metal beams located in said cavity, said beams being released from and thereby mechanically spaced from and movable with respect to said layer; a dielectric isolator hinge mechanically joining said first and second beams but electrically insulating said beams from each other; and beam support means connected between one of said first and second beams and said layer for mounting said first and second beams in said cavity. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A microstructure having electrically isolated, mechanically interconnected movable metal beams, comprising:
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a support layer; a cavity in said layer; a first metal beam located in a first plane within said cavity; a second metal beam located in a second plane within said cavity and spaced below and in vertical alignment with said first beam, said first and second beams being curved to form parallel induction coils, said first and second beams being released for mechanical and electrical isolation from said layer; and support means mounting said beams in said cavity.
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26. A microstructure having an electrically isolated, mechanically interconnected movable metal beam, comprising:
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a support layer; a cavity formed in said layer, said layer forming walls surrounding said cavity; first, second, and third axially aligned metal beam segments, said first and second beam segments being mounted to said layer; first and second dielectric hinges mechanically interposed between said first and third and between said second and third beam segments, respectively, to electrically isolate said third segment from said first and second segments and from said layer; and means on said layer adjacent said third segment for producing torsional motion in said third segment with respect to said first and second segments.
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Specification