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Amorphous oxide film and article having such film thereon

  • US 5,399,435 A
  • Filed: 01/16/1992
  • Issued: 03/21/1995
  • Est. Priority Date: 03/03/1988
  • Status: Expired due to Fees
First Claim
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1. An article with high durability, which comprises a glass substrate and an amorphous oxide film consisting essentially of an oxide containing Zr and Si (ZrSiz Oy), wherein the atomic ratio z of Si to Zr is 0.05≦

  • z<

    19, and the atomic ratio y of O to Zr is 2.1≦

    y<

    40.

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