Amorphous oxide film and article having such film thereon
First Claim
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1. An article with high durability, which comprises a glass substrate and an amorphous oxide film consisting essentially of an oxide containing Zr and Si (ZrSiz Oy), wherein the atomic ratio z of Si to Zr is 0.05≦
- z<
19, and the atomic ratio y of O to Zr is 2.1≦
y<
40.
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Abstract
An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.
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Citations
7 Claims
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1. An article with high durability, which comprises a glass substrate and an amorphous oxide film consisting essentially of an oxide containing Zr and Si (ZrSiz Oy), wherein the atomic ratio z of Si to Zr is 0.05≦
- z<
19, and the atomic ratio y of O to Zr is 2.1≦
y<
40. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- z<
Specification