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Optical multilayer thin film and beam splitter

  • US 5,400,179 A
  • Filed: 02/17/1993
  • Issued: 03/21/1995
  • Est. Priority Date: 02/18/1992
  • Status: Expired due to Term
First Claim
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1. An optical multilayer thin film, comprising:

  • a plurality of layers, said plurality of layers including at least three layers each having a refractive index in a first range, and at least two layers each having a refractive index in a second range, and at least one layer having a refractive index in a third range, wherein the refractive indices of the first, second and third ranges are different from each other;

    means for reflecting light which is incident on said thin film at an angle equal to or greater than 40°

    , such that the reflectances of S and P polarized components of the reflected light are substantially close to each other over a predetermined wavelength range and substantially no phase difference between the S and P polarized components in the reflected light is introduced by said light reflecting means, said light reflecting means comprising an arrangement of six layers laminated in sequence, in which said six layers include;

    a first, a third layer, and a fifth layer each having the refractive index in the first range;

    a second layer and a sixth layer each having the refractive index in the second range; and

    a fourth layer having the refractive index of the third range.

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