Optical multilayer thin film and beam splitter

• US 5,400,179 A
• Filed: 02/17/1993
• Issued: 03/21/1995
• Est. Priority Date: 02/18/1992
• Status: Expired due to Term

• Current Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
• Original Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
• Inventors: Ito, Taku
• Primary Examiner(s): Ben, Loha
• Assistant Examiner(s): Juba, Jr., John
• Application Number:
  US08/018,383
• Time in Patent Office: 762 Days
• Field of Search: 359/352, 359/359, 359/577, 359/580, 359/583, 359/586, 359/584, 359/580, 359/629, 359/588, 359/485, 359/487, 359/585, 359/360, 359/361, 359/640, 359/833, 359/638
• US Class Current: 359/588
• CPC Class Codes: G02B 27/1073 characterized by manufacturing or alignment methods
• CPC Class Codes: G02B 27/142 Coating structures, e.g. thin films multilayers
• CPC Class Codes: G02B 27/283 used for beam splitting or combining
• CPC Class Codes: G02B 5/0825 the reflecting layers comprising dielectric materials only
• CPC Class Codes: G02B 5/26 Reflecting filters G02B5/28 takes precedence
• CPC Class Codes: G02B 5/3041 comprising multiple thin layers, e.g. multilayer stacks

Abstract

An optical multilayer thin film and a beam splitter having an optical multilayer thin film are disclosed. The optical multilayer thin film is formed by laminating six layers in sequence. The laminated six layers comprise: a first layer, a third layer and a fifth layer each having a refractive index between 1.63 and 1.64; a second layer and a sixth layer each having a refractive index between 1.37 and 1.38, a fourth layer having a refractive index between 1.9 and 2.3; in which light is allowed to be incident upon the first layer of the optical multilayer thin film at the angle of incidence equal to or greater than 40°. In the beam splitter, the reflectances of S and P polarized components of reflected light are substantially equal to each other over a wide wavelength range and substantially no phase difference exists between the S and P polarized components. Further a beam splitter having a multilayer polarizing light separating film formed between an incoming side prism and an outgoing side prism is also disclosed, which is extremely high in the reflectance of the P polarized component of reflected light, in comparison with that of the S polarized component of the same reflected light.

Claims

1. An optical multilayer thin film, comprising:

a plurality of layers, said plurality of layers including at least three layers each having a refractive index in a first range, and at least two layers each having a refractive index in a second range, and at least one layer having a refractive index in a third range, wherein the refractive indices of the first, second and third ranges are different from each other;

means for reflecting light which is incident on said thin film at an angle equal to or greater than 40°

, such that the reflectances of S and P polarized components of the reflected light are substantially close to each other over a predetermined wavelength range and substantially no phase difference between the S and P polarized components in the reflected light is introduced by said light reflecting means, said light reflecting means comprising an arrangement of six layers laminated in sequence, in which said six layers include;

a first, a third layer, and a fifth layer each having the refractive index in the first range;

a second layer and a sixth layer each having the refractive index in the second range; and

a fourth layer having the refractive index of the third range.

2. The optical multilayer thin film as claimed in claim 1, wherein the refractive index of the first range is between 1.63 and 1.64;

the refractive index of the second range is between 1.37 and 1.38; and

the refractive index of the third range is between 1.9 and 2.3.

3. A beam splitter, comprising:

a first side prism having a refractive index between 1.45 and 1.95;

a second side prism having a refractive index between 1.5 and 1.55;

an optical multilayer thin film comprising a plurality of layers, said plurality of layers including at least three layers each having a refractive index in a first range, and at least two layers each having a refractive index in a second range, and at least one layer having a refractive index in a third range, wherein the refractive indices of the first, second and third ranges are different from each other; and

means for reflecting light which is incident on said thin film at an angle equal to or greater than 40°

, such that reflectances of S and P polarized components of the reflected light are substantially close to each other over a predetermined wavelength range and substantially no phase difference between the S and P polarized components the reflected light is introduced by said light reflecting means, said light reflecting means comprising laminated arrangement of six layers, in which said laminated six layers include;

a first layer, a third layer and a fifth layer each having the refractive index in the first range;

a second layer and a sixth layer each having the refractive index in the second range; and

a fourth layer having a refractive index in the third range.

4. The beam splitter as claimed in claim 3, wherein the refractive index of the first range is between 1.63 and 1.64;

the refractive index of the second range is between 1.37 to 1.38; and

the refractive index of the third range is from 1.9 between 2.3.

5. An optical multilayer thin film, comprising:

six layers laminated in sequence, said laminated six layers including;

a first layer, a third layer and a fifth layer each having a refractive index between 1.63 and 1.64;

a second layer and a sixth layer each having a refractive index between 1.37 and 1.38; and

a fourth layer having a refractive index between 1.9 and 2.3.

6. The optical multilayer thin film of claim 5, wherein each of said first to sixth layers does not substantially absorb light.

18. The optical multilayer thin film according to claim 5, further comprising means for allowing light to be incident upon said film at an angle of incidence equal to or greater than 40°

.

7. An optical multilayer thin film, comprising:

six layers laminated in sequence, said laminated layers including;

a first layer, a third layer and a fifth layer each formed of material containing as main component thereof at least one substance selected from a group consisting of aluminum oxide and lead fluoride;

a second layer and a sixth layer each formed of material containing as the main component thereof fluorine compound; and

a fourth layer formed of material comprising as the main component thereof at least one substance selected from a group consisting of titanium oxide, cerium oxide, zirconium oxide, neodymium oxide, tantalum oxide, praseodymium oxide, indium oxide, antimony oxide, ytterbium oxide, a mixture of cerium oxide and yttrium oxide, a mixture of tantalum oxide and yttrium oxide, and a mixture of silicon oxide and zirconium oxide.

8. The optical multilayer thin film of claim 7, wherein each of said first to sixth layers do not substantially absorb light.

19. The optical multilayer thin film according to claim 7, further comprising means for allowing light to be incident upon said film from said first layer at an angle of incidence equal to or greater than 40°

.

9. A beam splitter, comprising:

an incoming side prism having a refractive index between 1.45 and 1.95;

an outgoing side prism having a refractive index between 1.5 and 1.55; and

an optical multilayer thin film comprising six layers laminated in sequence, said laminated six layers including a first layer, a third layer and a fifth layer each having a refractive index between 1.63 and 1.64, a second layer and a sixth layer each having a refractive index between 1.37 to 1.38 and a fourth layer having a refractive index between 1.9 and 2.3, wherein said optical multilayer thin film is interposed between said incoming and outgoing side prisms in such a manner that said first layer is located adjacent to said incoming side prism.

10. The beam splitter of claim 9, wherein each of said incoming and outgoing side prisms does not substantially absorb light.

11. The beam splitter of claim 9, wherein each of first to sixth layers does not substantially absorb light.

12. The beam splitter as claimed in claim 9, wherein a difference between reflectances of S and P polarized components of reflected light is equal to or less than 10%.

13. The beam splitter as claimed in claim 9, wherein a difference in phase between S and P polarized components of reflected light lies within ±

5.5°

.

20. The beam splitter according to claim 9, further comprising means for allowing light to be incident upon said film at an angle of incidence equal to or greater than 40°

.

14. A beam splitter, comprising:

an incoming side prism having a refractive index between 1.45 to 1.95;

an outgoing side prism having a refractive index between 1.5 to 1.55; and

an optical multilayer thin film, comprising six layers laminated in sequence, said laminated layers including;

a first layer, a third layer and a fifth layer each formed of material containing as a main component at least one substance selected from a group consisting of aluminum oxide and lead fluoride;

a second layer and a sixth layer each formed of material containing as the main component fluorine compound; and

a fourth layer formed of material comprising as the main component at least one substance selected from a group consisting of titanium oxide, cerium oxide, zirconium oxide, neodymium oxide, tantalum oxide, praseodymium oxide, indium oxide, antimony oxide, ytterbium oxide, a mixture of cerium oxide and yttrium oxide, a mixture of tantalum oxide and yttrium oxide, and a mixture of silicon oxide and zirconium oxide.

15. The beam splitter of claim 14, wherein each of said incoming and outgoing side prisms does not substantially absorb light.

16. The beam splitter as claimed in claim 14, wherein a difference between reflectances of S and P polarized components of reflected light is equal to or less than 10%.

17. The beam splitter as claimed in claim 14, wherein a difference in phase between S and P polarized components of reflected light lies within ±

5.5°

.

21. The beam splitter according to claim 14, further comprising means for allowing light to be incident upon said optical multilayer thin film from said first layer at an angle of incidence equal to or greater than 40°

.