Environmental control system

• US 5,401,212 A
• Filed: 03/19/1993
• Issued: 03/28/1995
• Est. Priority Date: 08/29/1990
• Status: Expired due to Fees

• Current Assignee: Intelligent Enclosures Corp (DAW Technologies, Inc.)
• Original Assignee: Intelligent Enclosures Corp (DAW Technologies, Inc.)
• Inventors: Marvell, Greg A., Tanaka, Michael B., Genco, Robert M., Mundt, Gregory K.
• Primary Examiner(s): Joyce, Harold
• Application Number:
  US08/033,892
• Time in Patent Office: 739 Days
• Field of Search: 454/56, 454/57, 454/58, 454/61, 454/62, 454/187
• US Class Current: 454/187
• CPC Class Codes: F24F 3/163 Clean air work stations, i.e. selected areas within a space which filtered air is passed
• CPC Class Codes: F24F 3/167 Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed air distribution by perforated walls F24F7/10
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.

Claims

1. A modular system including a chamber having an input/output section, for enclosing a work piece and isolating it from the remainder of the room in which the chamber is located, comprising:

a. an upper section defining an aperture for permitting fluid to enter the chamber;

b. a filter, removably positioned within the chamber, for decontaminating the entering fluid;

c. means, associated with the chamber, for causing the decontaminated fluid to flow over the work piece in laminar fashion;

d. a hollow cover, attachable to the chamber, defining entrance and exit gaps for conveying the flowing fluid from a first location within the chamber to a second location outside the chamber;

e. means, positioned within the chamber, for isolating the entering fluid from the flowing fluid exiting the exit gap of the hollow cover; and

f. a product transport system adapted to be connected to the input/output section of the chamber, the product transport system defining a fan filter section for providing filtered fluid and comprising a pod for housing the work piece during transport to and from the chamber.

2. The modular system of claim 1 further comprising means for connecting the product transport system with the input/output section so that cross-flow of fluid between the chamber and the product transport system is minimized and so that minimal entry of fluid from the remainder of the room occurs.

6. The product transport system of claim 2 in which the interior of the frame is isolated from the surrounding environment so that the work piece is enclosed.

7. The product transport system of claim 6 in which the interior of the frame is accessed through a sealable portal.

8. The product transport system of claim 2 further comprising means for monitoring the environment of the product transport system.

3. A transport system including a frame having an interior and adapted to be connected to a modular chamber for enclosing a work piece and isolating it from the remainder of the room in which the transport system and chamber are located, comprising:

a. means for providing filtered fluid throughout the interior of the frame;

b. means for detachably connecting the frame to the chamber;

c. at least one rail formed within the interior of the frame; and

d. a cassette, adapted to attach to and slide along the rail, for housing the work piece during transport to and from the chamber.

4. The product transport system of claim 3 further comprising means for accessing and manipulating the work piece.

5. The product transport system of claim 4 in which the accessing means is a glove port.

9. A modular chamber with an upper section for enclosing a work piece and isolating it from the remainder of the room in which the chamber is located, comprising:

a. an aperture within the upper section for permitting decontaminated first fluid to enter the chamber;

b. means, associated with the chamber, for causing the decontaminated first fluid to flow vertically downward from the upper section;

c. at least one wall comprising;

i) a rear cover;

ii) a filter;

iii) means for channeling fluid into the wall;

iv) means for controlling the flow of fluid through the filter to produce decontaminated second fluid; and

v) means for directing the flow of decontaminated second fluid into the chamber; and

d. means for merging the decontaminated first fluid with the decontaminated second fluid so as to minimize the turbulence within the chamber.

10. The modular chamber of claim 9 further comprising a hollow covers attachable to at least one wall of the chamber, defining entrance and exit gaps for conveying fluid from a first location within the chamber to a second location outside the chamber.

11. The modular chamber of claim 10 further comprising means, positioned within the chamber, for isolating the decontaminated first and second fluid from the flowing fluid exiting the exit gap of the hollow cover.

12. The modular chamber of claim 9 further comprising an input/output section for accepting a product transport system adapted to be connected to the input/output section of the chamber.

13. The modular chamber of claim 12 in which the product transport system comprises a fan filter section for providing filtered fluid over a work piece during transport to and from the input/output section.

14. The modular chamber of claim 9 in which the controlling means comprises perforated sheets of material movable relative to one another so that the resistance offered to the decontaminated second fluid may be changed.

15. The modular chamber of claim 9 in which the merging means comprises a fan that maintains the velocity of the decontaminated first fluid higher than the velocity of the decontaminated second fluid.

16. A product transport system for use in combination with a modular environmental control system, the combination comprising:

a. the modular environmental control system including a chamber for enclosing a work piece and isolating it from a surrounding room, comprising;

i) an aperture for permitting fluid to enter the chamber;

ii) a filter for decontaminating the entering fluid;

iii) means, associated with the chamber, for causing the decontaminated fluid to flow over the work piece in laminar fashion;

(iv) means for conveying the flowing fluid from a first location within the chamber to a second location outside the chamber; and

(v) an input/output section, located within the chamber, comprising means for interfacing with the product transfer system and means for receiving the work piece; and

b. the product transport system including a frame having an interior and adapted to be connected to the modular environmental control system, comprising;

i) means for providing filtered fluid throughout the interior of the frame;

ii) means for detachably connecting the frame to the input/output section of the chamber; and

iii) at least one rail formed within the interior of the frame for transferring a work piece between the product transfer system and the input/output section of the modular chamber.

17. The combination of claim 16 in which the conveying means comprises a hollow cover, attachable to at least one wall of the chamber, defining entrance and exit gaps.

18. The combination of claim 16 in which the interfacing means comprises portals in each of the product transport system and the input/output section that mate together.

19. The combination of claim 18 further comprising means for determining whether the portals are sealed so that exposure of the work piece to fluid from the surrounding room is minimized.

20. The combination of claim 16 in which the chamber further comprises:

a. a rear cover and a front cover;

b. a second filter;

c. means for channeling fluid between the rear and front covers;

d. means for controlling the flow of fluid through the second filter to produce decontaminated second fluid; and

e. means for directing, in a generally horizontal direction, the flow of decontaminated second fluid through the front cover and into the chamber.