Method for forming macroparticle-free DLC films by cathodic arc discharge

• US 5,401,543 A
• Filed: 11/09/1993
• Issued: 03/28/1995
• Est. Priority Date: 11/09/1993
• Status: Expired due to Term

• Current Assignee: 3M Company
• Original Assignee: 3M Company
• Inventors: O'Neill, David G., Storer, Jonathan G.
• Primary Examiner(s): King, Roy V.
• Application Number:
  US08/149,292
• Time in Patent Office: 504 Days
• Field of Search: 427/580, 427/122, 204/298.41, 204/192.38
• US Class Current: 427/580
• CPC Class Codes: C23C 14/0605 Carbon
• CPC Class Codes: C23C 14/325 Electric arc evaporation

Abstract

The present invention provides a method for producing a diamond-like carbon coating. The method comprises the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form a coating on said substrate, said coating being substantially macroparticle free.

Claims

1. A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.

2. The method of claim 1 wherein said cathodic arc discharge is powered by a DC power source.

3. The method of claim 1 wherein said cathodic arc discharge is powered by a capacitor to produce a pulsed arc discharge.

4. The method of claim 1 wherein the arc voltage is between about 20 to 60 volts.

5. The method of claim 1 wherein the arc current is at least about 50 amps.

6. The method of claim 1 wherein said discharge is carried out in a magnetic field.

7. The method of claim 1 wherein said coating has a plasmon energy loss of at least about 26 electron volts.

8. The method of claim 1 wherein said coating has less than 100 macroparticles in an area of 804 μ

m×

651 μ

m at 106×

magnification.

9. The method of claim 1 wherein said coating has less than 10 macroparticles in an area of 200 μ

m×

162 μ

m at 426×

magnification.

10. A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon in a magnetic field and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.

11. The method of claim 10 wherein said discharge is carried out in a magnetic field.

12. A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.

13. The method of claim 12 wherein said discharge is carried out in a magnetic field.