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Three dimensional measuring apparatus

  • US 5,402,364 A
  • Filed: 01/15/1993
  • Issued: 03/28/1995
  • Est. Priority Date: 01/15/1993
  • Status: Expired due to Term
First Claim
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1. A three-dimensional measuring apparatus comprising:

  • a minimum of a pair of CCD cameras which respectively pick up an image of an objective surface of an objective workpiece requiring dimensional measurement;

    at least a single unit or a pair of laser scanner(s) which sequentially irradiates a plurality of spots on said objective surface with a laser beam, wherein said spots respectively make up measuring points when operating said pair of CCD cameras for measuring dimensions of said objective surface, and wherein said laser scanner directly irradiates on said objective surface a specific domain of said objective surface that has actually incurred error from a manufacturing process;

    an image processing unit which computes actual dimensions of said objective surface based on image data received from said pair of CCD cameras; and

    a computer system which initially makes a comparison between dimensional data of said objective surface received from said image processing unit and basic data of said objective surface previously prepared during design of said objective workpiece, and then determines said specific domain of said objective surface that has actually incurred error from said manufacturing process.

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