×

Hybrid pulsed valve for thin film coating and method

  • US 5,403,617 A
  • Filed: 09/15/1993
  • Issued: 04/04/1995
  • Est. Priority Date: 09/15/1993
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of coating a thin film on a substrate comprising the steps of:

  • generating a droplet of a liquid to coat said substrate; and

    generating a pulse of gas to contact and envelop said droplet, whereby said droplet is accelerated and propelled toward said substrate at a velocity at impact sufficient to cause said droplet to break up but being insufficient to cause splashing or rippling of said coating.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×