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Coating process using dense phase gas

  • US 5,403,621 A
  • Filed: 10/01/1993
  • Issued: 04/04/1995
  • Est. Priority Date: 12/12/1991
  • Status: Expired due to Term
First Claim
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1. A method for forming a solid coating of a material on a substrate comprising the steps of:

  • (a) providing a mixture of said material in gas or liquid form and a dense phase gas, wherein said material is capable of being dissolved in said dense phase gas, said dense phase gas having a critical temperature and a critical pressure;

    (b) placing said substrate in said chamber with said mixture at a temperature ranging from 25K below said critical temperature to 100K above said critical temperature and a pressure equal to or above the critical pressure of said dense phase gas whereby said material becomes dissolved in said dense phase gas to form a solution, and maintaining said contacting for a period of time which is sufficient to allow complete penetration of said solution into all surfaces of said substrate; and

    (d) shifting the phase of said dense phase gas from the supercritical state to the liquid state or from the liquid state to the supercritical state, whereby said material non-reactively precipitates out of said solution from said dense phase gas in said gas or liquid form and deposits in solid form on said substrate to form said coating on said substrate.

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