Method of fabricating a TFT

• US 5,403,762 A
• Filed: 06/28/1994
• Issued: 04/04/1995
• Est. Priority Date: 06/30/1993
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Takemura, Yasuhiko
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Radomsky, Leon
• Application Number:
  US08/266,712
• Time in Patent Office: 280 Days
• Field of Search: 437/40, 437/41, 437/44, 437/173, 437/908, 257/59, 257/900, 148/DIG. 1
• US Class Current: 438/164
• CPC Class Codes: G09G 2300/0408 Integration of the drivers onto the display substrate
• CPC Class Codes: H01L 21/02422 Non-crystalline insulating materials, e.g. glass, polymers
• CPC Class Codes: H01L 21/02488 Insulating materials
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02667 Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
• CPC Class Codes: H01L 21/02686 Pulsed laser beam
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: Y10S 148/091 Laser beam processing of fets

Abstract

Two kinds of TFTs are fabricated by the same process with a high production yield to manufacture an active-matrix circuit and a peripheral driver circuit on the same substrate. The active-matrix circuit is required to have a high mobility and a high ON/OFF current ratio. The peripheral driver circuit needs a complex interconnection structure. The active-matrix circuit and the peripheral driver circuit comprising the TFTs are fabricated monolithically. In this step, the gate electrodes of the TFTs of the active-matrix circuit are coated with an anodic oxide on their top and side surfaces. The gate electrodes of the TFTs of the peripheral driver circuit are coated with the anodic oxide on only their top surfaces; substantially no anodic oxide is present on the side surfaces.

Claims

1. A method of fabricating a semiconductor device comprising the steps of:

forming a semiconductor island on an insulating substrate;

forming an insulating layer acting as a gate-insulating film on the semiconductor island;

forming a conductive film comprising a metal on the insulating layer;

forming an anodic oxide layer on a surface of the conductive film by causing an electrical current to flow through the conductive film within an electrolyte;

forming a gate electrode by selectively removing the conductive film and the anodic oxide layer;

implanting an impurity ion into the semiconductor island by a self-aligning process, using the gate electrode as a mask; and

crystallizing the semiconductor island after the implanting step.

2. The method of claim 1 wherein the crystallizing is carried out by applying a light energy, a thermal energy or combination thereof to the semiconductor island.

3. The method of claim 1 wherein the crystallizing is carried out by thermally annealing the semiconductor island at 300°

to 550°

C., and subsequently irradiating a light to the semiconductor island.

4. The method of claim 1 wherein the crystallizing is carried out by irradiating a light to the semiconductor island, and subsequently thermally annealing the semiconductor island at 300°

to 550°

C.

5. The method of claim 1 wherein the crystallizing is carried out by thermally annealing the semiconductor island at 300°

to 550°

C., and subsequently irradiating a light to the semiconductor island, and subsequently thermally annealing the semiconductor island at 300°

to 550°

C.

6. The method of claim 3 wherein the insulating substrate is heated at 200°

to 500°

C. during the irradiation of the light.

7. The method of claim 4 wherein the insulating substrate is heated at 200°

to 500°

C. during the irradiation of the light.

8. The method of claim 5 wherein the insulating substrate is heated at 200°

to 500°

C. during the irradiation of the light.

9. The method of claim 1 wherein the anodic oxide layer is formed to a thickness of 300 Å

or more.

10. A method of fabricating a semiconductor device comprising the steps of:

forming a semiconductor layer on an insulating substrate;

photolithographically patterning the semiconductor layer into islands to form an active-matrix circuit and a peripheral driver circuit;

forming an insulating coating acting as a gate-insulating film on the islands of the semiconductor layer;

forming a conductive film comprising a metal on the insulating coating;

causing an electrical current to flow through the conductive film within an electrolyte to form an anodic oxide film on the conductive film;

photolithographically patterning the conductive film and the anodic oxide film to form gate electrodes on the islands;

causing an electrical current to flow through only the gate electrode of the active-matrix circuit within an electrolyte to form an anodic oxide on top and side surfaces of the gate electrode of the active-matrix circuit; and

implanting impurity ions into the islands of the semiconductor layer by a self-aligning process, using the gate electrodes of the active-matrix circuit and of the peripheral driver circuit as a mask.

11. The method of claim 10 further comprising the step of irradiating the islands with a light using the gate electrodes as a mask after the implanting step.

12. A method of fabricating a semiconductor device comprising the steps of:

forming a semiconductor layer on an insulating substrate;

photolithographically patterning the semiconductor layer into islands to form an active-matrix circuit and a peripheral driver circuit;

forming a gate-insulating film on the islands of the semiconductor layer;

forming a conductive film comprising a metal on the gate-insulating film;

selectively patterning the conductive film to form one gate electrode of the active-matrix circuit, a wiring connected with the one gate electrode, and a coating that covers the peripheral driver circuit;

causing an electrical current to flow through the one gate electrode, the wiring and the coating within an electrolyte to form one anodic oxide film on a surface of the one gate electrode and the wiring and to form another anodic oxide film on the coating;

photolithographically patterning the coating and the another anodic oxide film to form another gate electrode of the peripheral driver circuit; and

implanting impurity ions into the islands of the semiconductor layer by a self-aligning process, using the one gate electrode of the active-matrix circuit and the another gate electrode of the peripheral driver circuit as a mask.

13. The method of claim 12 further comprising the step of irradiating the islands with a light using the one gate electrode of the active-matrix circuit and the another gate electrode of the peripheral driver circuit as a mask after the implanting step.

14. The method of claim 13 wherein said light is a laser light or a light equivalent to a laser light.

15. The method of claim 12 wherein the one anodic oxide film is formed on the surface of the one gate electrode and the wiring to a thickness of 300 Å

or more.

16. The method of claim 12 wherein the another anodic oxide film is formed on the coating to a thickness of 300 Å

or more.

17. A method of fabricating a semiconductor device comprising the steps of:

forming semiconductor islands on a substrate, at least one of the semiconductor islands being formed in an active-matrix circuit, and at least another one of the semiconductor islands being formed in a peripheral circuit;

forming a gate insulating film on the semiconductor islands;

forming a conductive film on the gate insulating film in the active-matrix circuit and the peripheral circuit;

forming a gate electrode in the active matrix circuit and a coating that covers the entirety of the peripheral circuit, from the conductive film by patterning the conductive film;

causing an electrical current to flow through the gate electrode and the coating in an electrolyte to form one anodic oxide film on an upper and a side surface of the gate electrode and to form another anodic oxide film on an upper surface of the coating; and

patterning the another anodic oxide film and the coating to form another gate electrode provided with an anodic oxide on an upper surface thereof in the peripheral circuit.

18. A method of fabricating a semiconductor device comprising the steps of:

forming semiconductor islands on a substrate, at least one of the semiconductor islands being formed in an active-matrix circuit, and at least another one of the semiconductor islands being formed in a peripheral circuit;

forming a gate-insulating film on the semiconductor islands;

forming a conductive film on the gate-insulating film in the active-matrix circuit and the peripheral circuit;

forming an anodic oxide film on the entirety of the conductive film;

forming at least one gate electrode provided with an anodic oxide on an upper surface thereof in the peripheral circuit, and at least another one gate electrode provided with another anodic oxide on an upper surface of the another one gate electrode in the active-matrix circuit by patterning the anodic oxide film and the conductive film;

removing the another anodic oxide with the peripheral circuit being masked; and

forming a further anodic oxide on an upper and a side surface of the another one gate electrode.