Measuring method and measuring apparatus for determining the relative displacement of a diffraction grating with respect to a plurality of beams

• US 5,404,220 A
• Filed: 10/02/1992
• Issued: 04/04/1995
• Est. Priority Date: 10/03/1991
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Takeuchi, Seiji, Nose, Hiroyasu, Yoshii, Minoru, Ishizuka, Koh, Nishimura, Tetsuharu
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): WOLFE, RUSSELL
• Application Number:
  US07/955,979
• Time in Patent Office: 914 Days
• Field of Search: 356/356, 356/349, 356/351, 356/363, 250/237 G, 250/231.16
• US Class Current: 356/488
• CPC Class Codes: G01D 5/38 by diffraction gratings
• CPC Class Codes: G03F 9/7049 Technique, e.g. interferometric

Abstract

A method and an apparatus for measuring a very small displacement of an object. The first and second beat signals are produced by light beams of different frequencies diffracted by a diffraction grating. The phase difference between the first and second beat signals is detected, thereby measuring the relative displacement of the diffraction grating.

Claims

1. A measuring method, comprising the steps of:

producing a first pair of beams and a second pair of beams, said first pair of beams and second pair of beams each having higher and lower frequency light beams in order to form beat signals, respectively, and said first pair of beams and second pair of beams being produced so that the beat signals formed by each pair of beams have the same frequency;

diffracting each of said beams with a diffraction grating so that the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams are diffracted with a positive order, and the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams are diffracted with a negative order;

producing a first beat signal with the first pair of beams diffracted by said diffraction grating;

producing a second beat signal with the second pair of beams diffracted by said diffraction grating; and

detecting a phase difference between said first and second beat signals to thereby measure information concerning the relative displacement of the diffraction grating with respect to said first and second pairs of beams.

2. A measuring method according to claim 1, wherein said diffracting step is performed so that the respective beams are diffracted two times with the same order.

3. A measuring method according to claim 1, wherein said diffracting step comprises the steps of diffracting the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams with the same positive order, and diffracting the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams with the same negative order, respectively.

4. A measuring method according to claim 1, wherein said diffracting step comprises the steps of passing the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams along substantially the same optical path, and passing the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams along substantially the same optical path.

5. A measuring method according to claim 1, further comprising a step of propagating said first and second pairs of beams through a polarization maintaining optical fiber.

6. A measuring method according to claim 1, further comprising a step of propagating said first and second pairs of beams in a prism having a polarized beam splitter plane and a plane for reflecting said first and second pairs of beams.

7. A measuring apparatus for measuring information concerning a relative displacement with respect to a diffraction grating, comprising:

beam producing means for producing a first pair of beams and a second pair of beams, said first pair of beams and second pair of beams each having higher and lower frequency light beams in order to form beat signals, respectively, and said first pair of beams and second pair of beams being produced so that the beat signals formed by each pair of beams having the same frequency;

optical means, for guiding said beams to isolate specific diffraction orders so that the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams are diffracted with a positive order, and the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams are diffracted with a negative order;

first detection means for detecting a first beat signal produced by said first pair of beams, said first beat signal being produced by using said first pair of beams diffracted at the diffraction grating with said optical means;

second detection means for detecting a second beat signal produced by said second pair of beams, said second beat signal being produced by using said second pair of beams diffracted at the diffraction grating with said optical means; and

measuring means for measuring information concerning a phase change by comparing said first and second beat signals, and the relative displacement information for the diffraction grating being measured by the measurement conducted by said measuring means.

8. A measuring apparatus according to claim 7, wherein said optical means causes each of the beams to be diffracted two times with the same order.

9. A measuring apparatus according to claim 7, wherein said optical means comprises means for diffracting the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams with +first order, and for diffracting the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams with -first order.

10. A measuring apparatus according to claim 7, wherein said optical means comprising means for passing the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams along substantially the same optical path, and for passing the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams along substantially the same path.

11. A measuring apparatus according to claim 7, wherein said optical means has a polarization maintaining optical fiber to cause said beams to be propagated therein.

12. A measuring apparatus according to claim 7, wherein said optical means has a prism having a polarized beam splitter plane and a plane for reflecting said beams to cause said beams to be propagated therein.

13. A measuring apparatus for measuring a relative displacement information concerning two objects, comprising:

a diffraction grating adapted to be mounted on one of the two objects;

a beam producing portion for producing a first pair of beams and a second pair of beams, said first pair of beams and second pair of beams each having higher and lower frequency light beams in order to form beat signals, respectively, and said first pair of beams and second pair of beams being produced so that the beat signals formed by each pair of said beams having the same frequency;

an optical system adapted to be mounted on the other of the two objects and for guiding said beams to isolate specific diffraction orders so that the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams are diffracted with a positive order, and the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams is diffracted with a negative order;

first detection means for detecting a first beat signal produced by said first pair of beams, said first beat signal being produced by using said first pair of beams diffracted at said diffraction grating with said optical system,

second detection means for detecting a second beat signal produced by said second pair of beams, said second beat signal being produced by using said second pair of beams diffracted at said diffraction grating with said optical system; and

a signal processing portion for measuring information concerning a phase change by comparing said first and second beat signals, and the relative displacement information for said diffraction grating being measured by the signal processing executed by said signal processing portion.

14. A measuring apparatus for measuring a relative displacement information with respect to a diffraction grating, comprising:

beam producing means for producing a first pair of beams and a second pair of beams, said first pair of beams and second pair of beams having higher and lower frequency light beams in order to form beat signals, respectively, and said first pair of beams and second pair of beams being produced so that the beat signals formed by each pair of said beams having the same frequency;

optical means for guiding said beams to isolate specific diffraction orders so that the light beam of the lower frequency in said first pair of beams and the light beam of the higher frequency in said second pair of beams are diffracted with a first order, and the light beam of the higher frequency in said first pair of beams and the light beam of the lower frequency in said second pair of beams are diffracted with a second order different from said first order;

first detection means for detecting a first beat signal produced by said first pair of beams, said first beat signal being produced by using said first pair of beams diffracted by the diffraction grating with said optical means;

second detection means for detecting a second beat signal produced by said second pair of beams, said second beat signal being produced by using said second pair of beams diffracted by the diffraction grating with said optical means; and

measuring means for measuring information concerning a phase change by comparing said first and second beat signals, and the relative displacement information for the diffraction grating being measured by the measurement conducted by said measuring means.