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Surface inspection and characterization system and process

  • US 5,406,082 A
  • Filed: 11/27/1992
  • Issued: 04/11/1995
  • Est. Priority Date: 04/24/1992
  • Status: Expired due to Fees
First Claim
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1. A system for characterizing a rough, metallic surface, comprising:

  • a light source capable of generating an incident beam of light;

    means for directing the incident beam of light onto the surface to produce reflected light;

    an optical filter arrangement configured to separate light into at least a first set of wavelengths which includes a target wavelength band, a second set of wavelengths which includes a first reference wavelength band outside the target band and a third set of wavelengths which includes a second reference band outside the target band and on the opposite side of the target band as the first reference band;

    means for directing a component of the reflected light into said optical filter arrangement;

    a first detector capable of detecting the intensity of light at the target band and of generating a signal corresponding to the detected intensity;

    means for directing the first set of wavelengths of received light into said first detector;

    a second detector capable of detecting the intensity of light at the first reference band and of generating a signal corresponding to the detected intensity;

    a third detector capable of detecting the intensity of light at the second reference band and of generating a signal corresponding to the detected intensity;

    means for directing the second set of wavelengths of received light into said second detector;

    means for directing the third set of wavelengths of received light into said third detector, anda signal processor in communication with said first and said second detectors for processing the signal generated by said first and said second detectors.

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