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Micro electronic element and method of making same

  • US 5,406,109 A
  • Filed: 10/28/1992
  • Issued: 04/11/1995
  • Est. Priority Date: 10/28/1992
  • Status: Expired due to Fees
First Claim
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1. A miniature electronic element formed of and within a single crystal of semiconductor material, comprisingtop and bottom surface layers integral with said crystal and formed of an oxide of the semiconductor material, said layers being an integral part of said crystal,at least one isolated island of non-oxidized semiconductor material remaining between and integral with said top and bottom surface layers internally of said crystal,an isolating chamber formed within said crystal between said surface layers and around said island of semiconductor material to provide thermal isolation to the island of material except where said surface layers are integral with said island, andcontact members attached in predetermined spaced relation to one of said top and bottom surface layers and extending through said one surface layer to said island of semiconductor material and being connected thereto in spaced relation whereby the semiconductor material of the island between said contact members provides an electrical thermistor of predetermined value between said contact members.

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