Coated tantalum feedthrough pin
First Claim
1. In a method of fabricating a combination electrical feedthrough and capacitive structure wherein at least one conductive tantalum pin is included within the feedthrough construction and a portion thereof is contacted by an insulating body and a portion thereof is contacted by the capacitive structure, the improvement comprising providing a thin film protective conductive metal coating by vacuum depositing the coating on at least that portion of the tantalum pin to which the capacitive structure is to be contacted prior to contacting it with the capacitive structure.
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Accused Products
Abstract
Tantalum feedthrough conductor pins are provided with a thin, vacuum deposited metal coating to control oxidation growth during feedthrough fabrication. The coated feedthrough pins are incorporated into a feedthrough which includes a capacitive structure in electrical contact with the coated pin.
162 Citations
18 Claims
- 1. In a method of fabricating a combination electrical feedthrough and capacitive structure wherein at least one conductive tantalum pin is included within the feedthrough construction and a portion thereof is contacted by an insulating body and a portion thereof is contacted by the capacitive structure, the improvement comprising providing a thin film protective conductive metal coating by vacuum depositing the coating on at least that portion of the tantalum pin to which the capacitive structure is to be contacted prior to contacting it with the capacitive structure.
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6. A method of fabricating a combination feedthrough/capacitor comprising the steps:
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metallizing a tantalum pin by vacuum depositing a thin film coating selected from the group consisting of gold, platinum, palladium and titanium; inserting the pin through a metal ferrule and glassing it therein with a body of insulating glass, and contacting the pin with a capacitive structure within the ferrule. - View Dependent Claims (7, 8, 9)
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10. A method of fabricating a combination feedthrough/capacitor comprising the steps:
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inserting a tantalum pin through a metal ferrule and glassing same therein with a glass insulator body; metallizing at least that portion of the pin to be contacted by a capacitive structure with a thin film protective vacuum deposited metal coating selected to protect the pin from oxidation growth, and contacting the pin with a capacitive structure within the ferrule. - View Dependent Claims (11)
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- 12. In a combination electrical feedthrough/capacitor for minimizing EMI in an electrical device, including a tantalum feedthrough pin and a capacitive structure contacting a portion of the pin within a sealed metal ferrule, the improvement comprising a protective metal coating on at least that portion of the pin contacting the capacitive structure, the metal coating being a thin film vacuum deposited coating selected from those metals which are conductive and which protect the tantalum pin from oxidation formation when exposed to high temperatures.
Specification