Periodic dielectric structure for production of photonic band gap and method for fabricating the same
First Claim
1. A periodic dielectric structure which exhibits a photonic band gap comprising, in combination:
- a plurality of dielectric rods arranged in a matrix of a material having a different and contrasting refractive index, a number of said rods being arranged to form a planar layer, and a plurality of layers being stacked one on the other to form a three-dimensional structure,each layer having a plurality of rods arranged with parallel axes at a given spacing, each layer having its axes oriented at an angle with respect to its adjacent layers, alternate layers having their axes parallel to each other with the rods of one layer in offset between the rods of the other, thereby to form a three-dimensional structure of stacked layers having a four-layer periodicity,the dimensions of the rods, and the spacing between the rods, being selected to produce a photonic band gap at a given wavelength.
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Abstract
A method for fabricating a periodic dielectric structure which exhibits a photonic band gap. Alignment holes are formed in a wafer of dielectric material having a given crystal orientation. A planar layer of elongate rods is then formed in a section of the wafer. The formation of the rods includes the step of selectively removing the dielectric material of the wafer between the rods. The formation of alignment holes and layers of elongate rods and wafers is then repeated to form a plurality of patterned wafers. A stack of patterned wafers is then formed by rotating each successive wafer with respect to the next-previous wafer, and then placing the successive wafer on the stack. This stacking results in a stack of patterned wafers having a four-layer periodicity exhibiting a photonic band gap.
102 Citations
24 Claims
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1. A periodic dielectric structure which exhibits a photonic band gap comprising, in combination:
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a plurality of dielectric rods arranged in a matrix of a material having a different and contrasting refractive index, a number of said rods being arranged to form a planar layer, and a plurality of layers being stacked one on the other to form a three-dimensional structure, each layer having a plurality of rods arranged with parallel axes at a given spacing, each layer having its axes oriented at an angle with respect to its adjacent layers, alternate layers having their axes parallel to each other with the rods of one layer in offset between the rods of the other, thereby to form a three-dimensional structure of stacked layers having a four-layer periodicity, the dimensions of the rods, and the spacing between the rods, being selected to produce a photonic band gap at a given wavelength. - View Dependent Claims (2, 3, 4)
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5. A method of fabricating a periodic dielectric structure exhibiting a photonic band gap, comprising the steps of:
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(a) forming alignment holes in a wafer of dielectric material having a given crystal orientation; (b) forming at least one planar layer of elongate rods in a section of the wafer, including the step of selectively removing the dielectric material between the rods; (c) repeating steps (a) and (b) on a plurality of wafers to form a plurality of patterned wafers; and (d) forming a stack of patterned wafers having a four-layer periodicity by rotating each successive wafer with respect to the next-previous wafer, and then placing the successive wafer on the stack. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method for fabricating a periodic dielectric structure exhibiting a photonic band gap, comprising the steps of:
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(a) patterning a portion of a substrate of given dielectric material to form a layer of parallel rods; (b) bonding an epitaxial layer structure to the substrate, the epitaxial layer including a transfer layer of the given dielectric material, an etch-stop layer and a substrate layer; (c) etching the substrate layer; (d) etching the etch-stop layer; (e) patterning the transfer layer to expose an area of the transfer layer corresponding to a pattern of parallel rods having an axis perpendicular to an axis of the rods of the previous layer; and (f) repeating steps (b)-(e) and successively adding layers of parallel rods until the desired number of layers is reached. - View Dependent Claims (24)
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Specification