Physical variable sensor and method of manufacturing the same
First Claim
1. A physical variable sensor, comprising:
- a first substrate forming a surface substrate;
a second substrate forming a sensor substrate, said sensor substrate, comprising;
a sensor component which converts a physical variable measured into a characteristic electrical signal; and
a first electrical processor circuit which converts said characteristic electrical signal output from said sensor component into a compatible electrical signal; and
a third substrate forming an electrical processor circuit substrate, said electrical circuit substrate including a second electrical processor circuit which converts said compatible electrical signal into a specific electrical property, said first, second and third substrates are stacked and connected electrically to each other and said second and third substrates are connected together so that said output signal of said second substrate serves as an input signal to said third substrate.
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Accused Products
Abstract
A physical variable sensor with a processor circuit that can be used for any of a number of different applications. The variable sensor is compact and inexpensive to produce. The variable sensor comprises first, second and third substrates. On the second substrate is mounted a sensor component and a first processor circuit to convert the output of the sensor component to a standard electrical signal. A second processor circuit is provided on the third substrate. The second processor circuit includes an amplifier circuit, a digital fuzzy microprocessor and a luminous element to transmit an optical signal to the exterior. A solar cell can be provided on the first substrate to supply energy to the circuits. The first and third substrates are common to all types of sensors, and by modifying the second substrate different sensors to measure different types of variables can be produced.
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Citations
23 Claims
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1. A physical variable sensor, comprising:
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a first substrate forming a surface substrate; a second substrate forming a sensor substrate, said sensor substrate, comprising; a sensor component which converts a physical variable measured into a characteristic electrical signal; and a first electrical processor circuit which converts said characteristic electrical signal output from said sensor component into a compatible electrical signal; and a third substrate forming an electrical processor circuit substrate, said electrical circuit substrate including a second electrical processor circuit which converts said compatible electrical signal into a specific electrical property, said first, second and third substrates are stacked and connected electrically to each other and said second and third substrates are connected together so that said output signal of said second substrate serves as an input signal to said third substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A physical variable sensor, comprising:
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a surface substrate; a sensor substrate connected to said surface substrate, said sensor substrate including at least one sensor component and a first processor circuit receiving input from said at least one sensor component; a processor substrate connected to said sensor substrate, said processor substrate including a second processor circuit receiving input from said first processor circuit; and a power source for driving said circuits, wherein said sensor substrate can be substituted with another sensor substrate having at least one different sensor component for converting the physical variable sensor to detect a different physical property.
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Specification